Processing method and apparatus

  • US 7,534,159 B2
  • Filed: 03/31/2005
  • Issued: 05/19/2009
  • Est. Priority Date: 03/31/2003
  • Status: Expired due to Fees
First Claim
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1. A processing method, comprising:

  • elastically deforming a jig together with a work, the jig having been mounted on the work;

    compressing the work against a polishing surface; and

    moving the work and the polishing surface relative to each other, wherein;

    said elastically deforming includes controlling a load applied to the jig at a predetermined position for an elastic deformation, by assuming that there is a linear relationship between the load and a deformation amount of the work associated with the load; and

    said controlling the load includes;

    calculating a necessary polishing amount distribution based on a difference between a current shape of the work and a target shape of the work;

    calculating positional information of the work and a relative speed distribution between the work and the polishing surface; and

    calculating the load based on the polishing amount distribution and the relative speed distribution.

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