Active matrix type display device and method of manufacturing the same

• US 7,541,224 B2
• Filed: 11/22/2005
• Issued: 06/02/2009
• Est. Priority Date: 05/17/2002
• Status: Expired due to Fees

• Current Assignee: Japan Display Central Incorporated (Japan Display Incorporated)
• Original Assignee: Kabushiki Kaisha Toshiba (Toshiba Corporation)
• Inventors: Nakajima, Mitsuo, Hara, Yujiro, Hioki, Tsuyoshi, Onozuka, Yutaka, Akiyama, Masahiko
• Primary Examiner(s): Nguyen; Thinh T
• Application Number:
  US11/283,859
• Publication Number:
  US 20060076561A1
• Time in Patent Office: 1,288 Days
• Field of Search: 257/40, 257/59, 438455-459
• US Class Current: 438/149
• CPC Class Codes: G02F 1/133305 Flexible substrates, e.g. plastics, organic film
• CPC Class Codes: H01L 27/1214 comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
• CPC Class Codes: H01L 27/1218 with a particular composition or structure of the substrate
• CPC Class Codes: H01L 27/1266 the substrate on which the devices are formed not being the final device substrate, e.g. using a temporary substrate
• CPC Class Codes: H01L 29/78603 characterised by the insulating substrate or support H01L29/78657 takes precedence
• CPC Class Codes: H10K 2102/311 Flexible OLED
• CPC Class Codes: H10K 50/80 Constructional details
• CPC Class Codes: H10K 50/841 Self-supporting sealing arrangements
• CPC Class Codes: H10K 50/8426 Peripheral sealing arrangements, e.g. adhesives, sealants
• CPC Class Codes: H10K 50/844 Encapsulations
• CPC Class Codes: H10K 59/12 Active-matrix OLED [AMOLED] displays

Abstract

A method of manufacturing an active matrix type display device, which is reliable and flexible, is provided. An active matrix type display device according to an aspect of the present invention includes: a first substrate, which is flexible; a thin glass layer provided on the first substrate via an adhesion layer, and having projections and depressions on a surface thereof opposing to the first substrate, the projections and depressions having rounded tips and bottoms; active elements provided on the thin glass layer, each active element corresponding to a pixel; a display provided above the thin glass layer, and driven by the active elements to display an image pixel by pixel; and a second substrate provided on the display, and having an opposing electrode formed thereon.

Claims

1. A method of manufacturing an active matrix type display device, the method comprising:

forming active elements each corresponding to a pixel on a device forming substrate of glass;

polishing the device forming substrate to make it thinner by first performing a mechanical polishing, and then performing a chemical polishing, a thickness of the device forming substrate being 5 μ

m or more but 100 μ

m or less after polishing the device forming substrate, and a height of projections and depressions of the device forming substrate being in a range of a fiftieth to a half of the thickness;

bonding a surface of the device forming substrate, which has been polished, to a plastic substrate via an adhesion layer; and

forming a display driven by the active elements to display an image pixel by pixel, by placing a counter substrate so as to oppose to the device forming substrate.