Integrated circuit, semiconductor device comprising the same, electronic device having the same, and driving method of the same

• US 7,541,614 B2
• Filed: 03/08/2004
• Issued: 06/02/2009
• Est. Priority Date: 03/11/2003
• Status: Expired due to Fees

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Kato, Kiyoshi
• Primary Examiner(s): AUDUONG, GENE NGHIA
• Application Number:
  US10/793,806
• Publication Number:
  US 20040246765A1
• Time in Patent Office: 1,912 Days
• Field of Search: 365/149, 365/108, 365/109, 365/184, 365/189.01, 257/250, 257/296, 257/365, 257/366, 438/176, 438/157
• US Class Current: 257/66
• CPC Class Codes: G11C 11/404 with one charge-transfer gate, e.g. MOS transistor, per cell
• CPC Class Codes: H01L 27/12 the substrate being other than a semiconductor body, e.g. an insulating body
• CPC Class Codes: H01L 29/7841 with floating body, e.g. programmable transistors
• CPC Class Codes: H01L 29/78621 with LDD structure or an extension or an offset region or characterised by the doping profile
• CPC Class Codes: H01L 29/78648 arranged on opposing sides of the channel
• CPC Class Codes: H10B 12/00 Dynamic random access memory [DRAM] devices

Abstract

An integrated circuit mounting a DRAM which can realize high integration without complicated manufacturing steps. The integrated circuit according to the invention comprises a DRAM in which a plurality of memory cells each having a thin film transistor are disposed. The thin film transistor comprises an active layer including a channel forming region, and first and second electrodes overlapping with each other with the channel forming region interposed therebetween. By controlling a drain voltage of the thin film transistor according to data, it is determined whether to accumulate holes in the channel forming region or not, and data is read out by confirming whether or not holes are accumulated.

Claims

1. A semiconductor device comprising:

a DRAM comprising a first thin film transistor over a substrate, the first thin film transistor comprising;

a first gate electrode over the substrate;

a first insulating layer over the first gate electrode;

a first island-shaped semiconductor film over the first insulating layer;

a second insulating layer over the first island-shaped semiconductor film;

a second gate electrode over the second insulating layer; and

a third insulating layer over the second gate electrode;

a bit line over the third insulating layer and electrically connected to a first impurity region of the first island-shaped semiconductor film;

a source line over the third insulating layer and electrically connected to a second impurity region of the first island-shaped semiconductor film;

a pixel portion comprising a second thin film transistor over the substrate, the second thin film transistor comprising;

a second island-shaped semiconductor film over the first insulating layer;

the second insulating layer over the second island-shaped semiconductor film;

a third gate electrode over the second insulating layer; and

the third insulating layer over the third gate electrode;

a wiring over the third insulating layer and electrically connected to an impurity region of the second island-shaped semiconductor film; and

a pixel electrode electrically connected to the wiring,

wherein the first and second gate electrodes overlap with each other with the first island-shaped semiconductor film interposed therebetween; and

wherein the substrate is selected from the group consisting of a glass substrate, a quartz substrate, a ceramic substrate, a metal substrate, and a substrate formed from a synthetic resin.

2. An electronic device having the semiconductor device according to claim 1, wherein said electronic device is selected from the group consisting of a video camera, a digital camera, a goggle display, a navigation system, a sound reproduction device, a notebook personal computer, a game machine, a portable information device, and an image reproduction device.

3. The semiconductor device according to claim 1, wherein the first gate electrode is connected to a first word line and the second gate electrode is connected to a second word line.

4. The semiconductor device according to claim 1, further comprising a protective layer over the first and second thin film transistors.

5. The semiconductor device according to claim 1, further comprising a third thin film transistor provided between the first thin film transistor and the bit line.

6. The semiconductor device according to claim 1, wherein the second thin film transistor is a thin film transistor for controlling a current supply.

7. The semiconductor device according to claim 1, wherein the first thin film transistor is an n-channel thin film transistor and the second thin film transistor is a p-channel thin film transistor.

8. A semiconductor device comprising:

a DRAM comprising a first thin film transistor over a substrate, the first thin film transistor comprising;

a first gate electrode over the substrate;

a first insulating layer over the first gate electrode;

a first island-shaped semiconductor film over the first insulating layer;

a second insulating layer over the first island-shaped semiconductor film;

a second gate electrode over the second insulating layer; and

a third insulating layer over the second gate electrode;

a bit line over the third insulating layer and electrically connected to a first impurity region of the first island-shaped semiconductor film;

a source line over the third insulating layer and electrically connected to a second impurity region of the first island-shaped semiconductor film;

a pixel portion comprising a second thin film transistor over the substrate, the second thin film transistor comprising;

a second island-shaped semiconductor film over the first insulating layer;

the second insulating layer over the second island-shaped semiconductor film;

a third gate electrode over the second insulating layer; and

the third insulating layer over the third gate electrode;

a wiring over the third insulating layer and electrically connected to an impurity region of the second island-shaped semiconductor film;

a first electrode electrically connected to the wiring;

a light emitting layer over the pixel electrode; and

a second electrode over the light emitting layer;

wherein the first and second gate electrodes overlap with each other with the first island-shaped semiconductor film interposed therebetween, and

wherein the substrate is selected from the group consisting of a glass substrate, a quartz substrate, a ceramic substrate, a metal substrate, and a substrate formed from a synthetic resin.

9. An electronic device having the semiconductor device according to claim 8, wherein said electronic device is selected from the group consisting of a video camera, a digital camera, a goggle display, a navigation system, a sound reproduction device, a notebook personal computer, a game machine, a portable information device, and an image reproduction device.

10. The semiconductor device according to claim 8, wherein the first gate electrode is connected to a first word line and the second gate electrode is connected to a second word line.

11. The semiconductor device according to claim 8, further comprising a protective layer over the first and second thin film transistors.

12. The semiconductor device according to claim 8, further comprising a third thin film transistor provided between the first thin film transistor and the bit line.

13. The semiconductor device according to claim 8, wherein the second thin film transistor is a thin film transistor for controlling a current supply.

14. The semiconductor device according to claim 8, wherein the first thin film transistor is an n-channel thin film transistor and the second thin film transistor is a p-channel thin film transistor.