Integrated optical scanning image acquisition and display

• US 7,555,333 B2
• Filed: 09/04/2003
• Issued: 06/30/2009
• Est. Priority Date: 06/19/2000
• Status: Expired due to Fees

• Current Assignee: Energy Conversion Devices, University of Washington, Washington University In St Louis
• Original Assignee: University of Washington
• Inventors: Wang, Wei-Chi, Brown, Chris M., Fauver, Mark E., Seibel, Eric J., Reinhall, Per G.
• Primary Examiner(s): Winakur; Eric F
• Assistant Examiner(s): Shahrestani; Nasir
• Application Number:
  US10/655,482
• Publication Number:
  US 20040122328A1
• Time in Patent Office: 2,126 Days
• Field of Search: 600/476, 600/407, 385/12, 385/43, 385/13
• US Class Current: 600/476
• CPC Class Codes: A61B 1/00048 Constructional features of the display
• CPC Class Codes: A61B 1/0008 characterised by distal tip features
• CPC Class Codes: A61B 1/00165 with light-conductive means, e.g. fibre optics A61B1/07 takes precedence
• CPC Class Codes: A61B 1/00167 Details of optical fibre bundles, e.g. shape or fibre distribution
• CPC Class Codes: A61B 1/00172 with means for scanning
• CPC Class Codes: A61B 1/00183 for variable viewing angles
• CPC Class Codes: A61B 1/00193 adapted for stereoscopic vision
• CPC Class Codes: A61B 1/0051 with controlled bending of insertion part
• CPC Class Codes: A61B 1/043 for fluorescence imaging
• CPC Class Codes: A61B 1/063 for monochromatic or narrow-band illumination
• CPC Class Codes: A61B 1/0638 providing two or more wavelengths
• CPC Class Codes: A61B 1/0655 Control therefor
• CPC Class Codes: A61B 5/0062 Arrangements for scanning
• CPC Class Codes: A61B 5/0066 Optical coherence imaging
• CPC Class Codes: A61B 5/0068 Confocal scanning
• CPC Class Codes: A61B 5/0071 by measuring fluorescence emission
• CPC Class Codes: A61B 5/0075 by spectroscopy, i.e. measuring spectra, e.g. Raman spectroscopy, infrared absorption spectroscopy A61B5/0071 takes precedence
• CPC Class Codes: A61B 5/0084 for introduction into the body, e.g. by catheters A61B5/1459 takes precedence
• CPC Class Codes: A61B 5/0086 using infrared radiation
• CPC Class Codes: A61B 5/1076 for measuring dimensions inside body cavities, e.g. using catheters A61B3/1005 takes precedence
• CPC Class Codes: A61N 5/0601 : Apparatus for use inside the body
• CPC Class Codes: A61N 5/062 : Photodynamic therapy, i.e. excitation of an agent
• CPC Class Codes: G02B 23/2484 : Arrangements in relation to a camera or imaging device processing or control of video signals generated by an endoscope H04N23/60, H04N23/70
• CPC Class Codes: G02B 26/0875 : by means of one or more refracting elements
• CPC Class Codes: G02B 26/10 : Scanning systems
• CPC Class Codes: G02B 26/101 : with both horizontal and vertical deflecting means, e.g. raster or XY scanners colour television using laser beams scanning a display screen H04N9/3129
• CPC Class Codes: G02B 6/262 : Optical details of coupling light into, or out of, or between fibre ends, e.g. special fibre end shapes or associated optical elements
• CPC Class Codes: G02B 6/32 : having lens focusing means positioned between opposed fibre ends with lens being an integral part of the single fibre end G02B6/262
• CPC Class Codes: G02B 6/3502 : involving direct waveguide displacement, e.g. cantilever type waveguide displacement involving waveguide bending, or displacing an interposed waveguide between stationary waveguides
• CPC Class Codes: G02B 6/3566 : involving bending a beam, e.g. with cantilever
• CPC Class Codes: G02B 6/357 : Electrostatic force electrostatic forces controlling reflecting elements in general G02B26/0841
• CPC Class Codes: G02B 6/3572 : Magnetic force magnetic forces controlling reflecting elements in general G02B26/085; magneto-optic devices G02F1/09
• CPC Class Codes: G02B 6/3578 : Piezoelectric force piezoelectric forces controlling reflecting elements in general G02B26/0858; piezo-optic devices G02F1/0131

Abstract

An apparatus and method for providing image acquisition and/or image display in a limited region of interest (ROI). The apparatus comprises a micro electro-mechanical system (MEMS), preferably integrating a light source, a cantilever, a lens, an actuator, a light detector, and a position sensor. The light source provides light for illuminating the ROI, displaying an image, providing a therapy, and/or performing other functions. The cantilever comprises a resin waveguide with a fixed end attached to a substrate that supports many or all other components. A free end of the cantilever is released from the substrate during fabrication and includes the lens. The actuator scans the free end in orthogonal directions to illuminate the ROI or display an image. The position sensors detect the position of the free end for control. The light detector receives light backscattered from the ROI separate from, or at the fixed end the cantilever.

Claims

1. Apparatus for display of an image, in regard to a limited region of interest, comprising:

(a) a light source, which emits light;

(b) a cantilever comprising a fixed end and a free end, the fixed end remaining fixed to a substrate, the substrate having a proximal end that serves as a support for the fixed end of the cantilever and having a distal end configured to include a channel, the free end of the cantilever extending freely relative to the substrate, enabling a portion of the free end to bend and deflect within the channel in regard to the limited region of interest, the bending of the cantilever scanning light onto an image plane to create an image, wherein the cantilever is configured as one of;

(i) a waveguide that conveys light from the light source within the cantilever, when scanning the light onto the image plane to create the image; and

(ii) a moving carrier for the light source that emits the light, the light source being mounted on the free end of the cantilever and moving when scanning the light emitted by the light source onto the image plane to create the image;

(c) an actuator disposed adjacent to the cantilever and being employed for deflecting the cantilever so as to move the free end to scan in a desired motion;

(d) a photon detector configured to receive light at a location that is proximate to both the free end of the cantilever and the distal end of the support; and

(e) a position sensor employed for detecting a position of the free end of the cantilever, for producing a signal used in controlling the actuator to cause the cantilever to move in the desired motion.

2. The apparatus of claim 1, wherein the apparatus fits within a volume measuring less than three millimeters in width and height, which are orthogonal to a longitudinal axis of the cantilever.

3. The apparatus of claim 1, wherein the light source provides the light using at least one of a diode, a laser, and an optical fiber.

4. The apparatus of claim 1, wherein the light source is one of:

(a) end-butted to the fixed end of the cantilever; and

(b) attached adjacent to the free end of the cantilever.

5. The apparatus of claim 1, wherein the cantilever comprises at least one of a silicon oxide, a silicon nitride, a glass, a polymer, a photoresist, and an epoxy resin.

6. The apparatus of claim 1, wherein the cantilever is tapered in at least one dimension such that the fixed end is larger than the free end in said at least one dimension.

7. The apparatus of claim 1, wherein a dimension of the cantilever varies from the fixed end to the free end to determine vibrational characteristics of the cantilever.

8. The apparatus of claim 1, wherein the cantilever is formed by at least one of a deep reactive ion etching, a photolithography, an e-beam lithography and a wet anisotropic etching of the substrate using a mask to define a shape of the cantilever.

9. The apparatus of claim 1, wherein the actuator comprises one of an electrostatic force actuator, a piezoelectric actuator, and an electromagnetic actuator.

10. The apparatus of claim 1, wherein the actuator comprises at least one of:

(a) an actuator for deflecting the cantilever in a vertical direction relative to a primary plane of the substrate; and

(b) an actuator for deflecting the cantilever in a horizontal direction relative to the primary plane of the substrate.

11. The apparatus of claim 1, wherein the actuator is attached to at least one of:

(a) the cantilever; and

(b) the substrate.

12. The apparatus of claim 1, wherein the position sensor comprises one of:

(a) the actuator;

(b) a piezoelectric transducer;

(c) a capacitive displacement transducer;

(d) a piezoresistive sensor;

(e) a light source and detector pair;

(f) a photodetector array;

(g) a magnetic sensor;

(h) a fiber bundle displacement sensor;

(i) an interferometer; and

(j) an inductive displacement transducer.

13. The apparatus of claim 1, wherein the cantilever configured as the waveguide further comprises a lens disposed proximate to the free end of the cantilever through which the light conveyed through the cantilever passes.

14. The apparatus of claim 13, wherein the lens comprises one of a focusing lens, a refractive lens, and a diffractive lens.

15. The apparatus of claim 13, wherein the free end of the cantilever comprises a gradient index lens.

16. The apparatus of claim 1, wherein the light source comprises:

(a) a white light source; and

(b) a tunable color filter to provide precise color spectrum of light, the tunable color filter comprising one of;

(i) an optical resonant cavity;

(ii) a grating; and

(iii) a prism.

17. The apparatus of claim 1, wherein the light source comprises a plurality of color elements, each of the plurality of color elements producing a different color light.

18. Apparatus for use either for a far-field image acquisition or for a display of an image, in regard to a limited region of interest comprising a target, wherein the apparatus is configured as a micro-electro-mechanical system (MEMS), the apparatus comprising:

(a) a light source, which emits light;

(b) a substrate that serves as a support, said substrate having a proximal end and a distal end;

(c) a cantilever comprising at least one of a thin film layer and a thick film layer and having a fixed end and a free end, the fixed end remaining fixed proximal to the proximal end of the substrate upon which the cantilever was originally formed and the free end extending freely beyond where the substrate has been removed from supporting the cantilever to define a channel in the substrate, enabling the free end to bend and deflect relative to the channel in the substrate and enabling the free end to bend and deflect relative to the limited region of interest, for scanning with the free end of the cantilever relative to the target;

(d) an actuator disposed adjacent to the cantilever, the actuator being employed for bending and deflecting the cantilever so as to move the free end in a desired motion, to scan at least a portion of the limited region of interest;

(e) a photon detector configured to receive light at a location that is proximate to both the free end of the cantilever and the distal end of the support; and

(f) a position sensor employed for detecting a position of the free end of the cantilever, for producing a signal used in controlling the actuator to cause the cantilever to move in the desired motion.

19. The apparatus of claim 18, wherein the apparatus fits within a volume measuring less than three millimeters in width and height, which are orthogonal to a longitudinal axis of the cantilever.

20. The apparatus of claim 18, wherein the light source provides the light using at least one of a diode, a laser, and an optical fiber.

21. The apparatus of claim 18, wherein the light source is one of:

(a) end-butted to the fixed end of the cantilever; and

(b) attached adjacent to the free end of the cantilever.

22. The apparatus of claim 18, wherein the cantilever comprises at least one of a silicon oxide, a silicon nitride, a glass, a polymer, a photoresist, and an epoxy resin.

23. The apparatus of claim 18, wherein the cantilever is tapered in at least one dimension such that the fixed end is larger than the free end in said at least one dimension.

24. The apparatus of claim 18, wherein a dimension of the cantilever varies from the fixed end to the free end to determine vibrational characteristics of the cantilever.

25. The apparatus of claim 18, wherein the cantilever is formed by at least one of a deep reactive ion etching, a photolithography, an electron beam lithography, and a wet anisotropic etching of the substrate using a mask to define a shape of the cantilever.

26. The apparatus of claim 18, wherein the cantilever comprises one of:

(a) an emitting waveguide that receives the light at the fixed end and directs the light received to the free end, where the light is emitted for illuminating the target;

(b) a receiving waveguide that receives light that is reflected from the target through the free end and directs the received light to the fixed end for detection by the photon detector; and

(c) a flexible member that supports the light source.

27. The apparatus of claim 18, wherein the actuator comprises one of an electrostatic force actuator, a piezoelectric actuator, and a magnetic actuator.

28. The apparatus of claim 18, wherein the actuator comprises at least one of:

(a) an actuator for deflecting the cantilever in a vertical direction relative to a primary plane of the substrate; and

(b) an actuator for deflecting the cantilever in a horizontal direction relative to the primary plane of the substrate.

29. The apparatus of claim 18, wherein the actuator is attached to at least one of:

(a) the cantilever; and

(b) the substrate.

30. The apparatus of claim 18, wherein the position sensor comprises one of:

(a) the actuator;

(b) a piezoelectric transducer;

(c) a capacitive displacement transducer;

(d) a piezoresistive sensor;

(e) a light source and detector pair;

(f) a photodetector array;

(g) a magnetic sensor;

(h) a fiber bundle displacement sensor;

(i) an interferometer; and

(j) an inductive displacement transducer.

31. The apparatus of claim 18, farther comprising a lens disposed proximate to the free end of the cantilever through which the light passes.

32. The apparatus of claim 31, wherein the lens comprises one of a focusing lens, a refractive lens, and a diffractive lens.

33. The apparatus of claim 31, wherein the free end of the cantilever comprises a gradient index lens.

34. The apparatus of claim 18, wherein the photon detector is supported by one of the substrate and the cantilever.

35. The apparatus of claim 18, wherein the photon detector is disposed at one of:

(a) adjacent to the free end of the cantilever, to detect light emitted from the free end of the cantilever that has been reflected from the target;

(b) adjacent to the fixed end of the cantilever, to detect light that has been received from the target at the free end of the cantilever and conveyed to the fixed end of the cantilever; and

(c) on the free end of the cantilever, to detect light emitted from the free end of the cantilever that has been reflected from the target.

36. The apparatus of claim 18, further comprising a controller that causes the actuator to drive the free end of the cantilever in a pattern relative to the target, so as to do one of:

(a) display an image on the target; and

(b) acquire an image of the target.

37. The apparatus of claim 18, further comprising at least one of:

(a) a tapered waveguide coupler optically coupling the light source to the cantilever; and

(b) an index-matching material optically coupling the light source to the cantilever.

38. The apparatus of claim 18, further comprising a flexible sheath enclosing the light source, substrate, cantilever, actuator, and position sensor, so that the apparatus is usable as an endoscope.

39. A method for enabling either a far-field image acquisition or a display of an image, in regard to a limited region of interest, using a micro-electro-mechanical system (MEMS), comprising the steps of:

(a) providing a cantilever on a substrate, wherein

a portion of the substrate underlying the cantilever is removed, thereby forming an elongated groove and

supporting the cantilever at a fixed end of the cantilever, the fixed end remaining fixed to the substrate, a free end of the cantilever extending freely beyond where the portion of the substrate was removed from supporting the cantilever, enabling the free end to bend and deflect both within the elongated groove and relative to a target in the limited region of interest, for scanning the target;

(b) bending and deflecting the cantilever so as to move the free end in a desired motion to scan the target;

(c) receiving light at a location that is proximate to the cantilever and to the support;

(d) detecting a position of the free end of the cantilever, producing a signal indicative of the position; and

(e) controlling the cantilever to move in the desired motion.

40. The method of claim 39, wherein the cantilever is less than one millimeter in length.

41. The method of claim 39, further comprising one of the steps of:

(a) end-butting a light source to the fixed end of the cantilever; and

(b) attaching a light source adjacent to the free end of the cantilever.

42. The method of claim 39, further comprising the step of tapering the cantilever in at least one dimension, such that the fixed end is larger than the free end in said at least one dimension.

43. The method of claim 39, further comprising the step of forming the cantilever by at least one of a deep reactive ion etching and a wet anisotropic etching of the substrate using a mask to define a shape of the cantilever.

44. The method of claim 39, further comprising at least one of the steps of:

(a) receiving light at the fixed end and directing the light received to the free end, said cantilever acting as a waveguide, said free end emitting light to illuminate the target;

(b) receiving light that is reflected from the target through the free end and directing the light that is received to the fixed end for detection by a photon detector; and

(c) supporting a light source at the free end, said light source emitting light that illuminates the target.

45. The method of claim 39, wherein the step of deflecting comprises one of the steps of:

(a) deflecting the cantilever into a resonant motion in at least one of two orthogonal directions; and

(b) deflecting the cantilever so as to selectively move the free end to a desired position.

46. The method of claim 39, where the step of deflecting comprises at least one of the steps of:

(a) deflecting the cantilever in a vertical direction relative to a primary plane of the substrate; and

(b) deflecting the cantilever in a horizontal direction relative to the primary plane of the substrate.

47. The method of claim 39, wherein the step of sensing the position of the cantilever is done with one of:

(a) an actuator, when the actuator is not being employed for driving the cantilever to move in the desired motion;

(b) a piezoelectric transducer;

(c) a capacitive displacement transducer;

(d) a piezoresistive sensor;

(e) a light source and detector pair;

(e) a photodetector array;

(f) a magnetic sensor;

(g) a fiber bundle displacement sensor;

(h) an interferometer; and

(j) an inductive displacement transducer.

48. The method of claim 39, further comprising the step of focusing light transmitted through the free end of the cantilever.

49. The method of claim 48, wherein the step of focusing light is done with one of:

(a) a refractive lens;

(b) a diffractive lens; and

(c) a gradient index lens formed at the free end of the cantilever.

50. The method of claim 39, further comprising the step of detecting light that is reflected from the target.

51. The method of claim 50, wherein the step of detecting the light is carried out with one of:

(a) a light sensor that is disposed adjacent to the free end of the cantilever, to detect light emitted from the free end of the cantilever that is reflected from the target; and

(b) a light sensor that is disposed adjacent to the fixed end of the cantilever, to detect light that has been received from the target at the free end of the cantilever and conveyed to the fixed end of the cantilever.

52. The method of claim 39, wherein the step of deflecting the cantilever comprises the step of driving the free end of the cantilever to move in a pattern relative to the target so as to do one of the steps of:

(a) displaying an image on the target; and

(b) acquiring an image of the target.

53. The method of claim 39, further comprising at least one of the steps of:

(a) coupling a light source to the fixed end of the cantilever through a tapered waveguide coupler; and

(b) coupling a light source to the fixed end of the cantilever with an index-matching material.

54. The method of claim 39, further comprising the step of enclosing at least the substrate and the cantilever in a flexible sheath to function as an endoscope.