Capacitance detection circuit and capacitance detection method

• US 7,557,590 B2
• Filed: 08/05/2004
• Issued: 07/07/2009
• Est. Priority Date: 08/06/2003
• Status: Expired due to Fees

• Current Assignee: Tokyo Electron Limited
• Original Assignee: Tokyo Electron Limited
• Inventors: Yakabe, Masami
• Primary Examiner(s): Gutierrez; Diego
• Assistant Examiner(s): Baldridge; Benjamin M
• Application Number:
  US10/567,092
• Publication Number:
  US 20080150553A1
• Time in Patent Office: 1,797 Days
• Field of Search: 324/686
• US Class Current: 324/686
• CPC Class Codes: H04R 3/00 Circuits for transducers , loudspeakers or microphones

Abstract

A capacitance detection circuit containing an input protection circuit and having high sensitivity is provided. A capacitance detection circuit for detecting the capacitance of a capacitive sensor, comprising a buffer amplifier connected to the capacitive sensor via a signal wire and having a voltage gain of 1; diodes connected in series between the signal wire and a positive power supply; diodes connected in series between the signal wire and a negative power supply, wherein an output terminal of the buffer amplifier is connected to a junction point of the diodes and to a junction point of the diodes.

Claims

1. A capacitance detection circuit, comprising:

a first buffer amplifier, wherein an input of said first buffer amplifier is connected to a capacitor to be detected by a signal wire;

a first diode and a second diode, connected in series, the anode of the first diode connected to the cathode of the second diode at a first junction point, and the anode of the second diode connected to the signal wire, and the cathode of the first diode connected to a first power supply;

a third diode and a fourth diode, connected in series, the anode of the third diode connected to the cathode of the fourth diode at a second junction point, and the cathode of the third diode connected to the signal wire, and the anode of the fourth diode connected to a second power supply;

wherein;

an output terminal of the first buffer amplifier is connected to the first junction point of the first diode and the second diode via a first capacitance;

said output terminal of the first buffer amplifier is connected to the second junction point of the third diode and the fourth diode via a second capacitance;

the first junction point is connected to a point having a voltage whose value is between the voltage of the first power supply, and the voltage of the signal wire, via a first resistor;

the second junction point is connected to a point having a voltage whose value is between the voltage of the second power supply and the voltage of the signal wire, via a second resistor.

2. The capacitance detection circuit according to claim 1,

wherein a voltage gain of the first buffer amplifier unit is 1.

3. The capacitance detection circuit according to claim 1,

wherein the first resistor and first capacitance are components of a high pass filter that passes frequency elements of output signals from the first buffer amplifier corresponding to varying capacitance of the capacitor to be detected, and AC components of a bias voltage added to said capacitor to be detected, and

the second resistor and second capacitance are, respectively, a resistance value and a capacitance value that pass frequency elements of output signals from the first buffer amplifier corresponding to varying capacitance of the capacitor to be detected, and AC components of a bias voltage added to the said capacitor to be detected.

4. The capacitance detection circuit according to claim 1, further comprising:

a second buffer amplifier unit connected between (i) a junction point of the first resistor and the first capacitor and (ii) the first junction point; and

a third buffer amplifier unit connected between (i) a junction point of the second resistor and the second capacitor and (ii) the second junction point.

5. The capacitance detection circuit according to claim 4,

wherein each voltage gain of the first to third buffer amplifier units is set so that voltage of the first junction point and voltage of the second junction point are same as voltage of the signal wire.

6. The capacitance detection circuit according to claim 1,

wherein the first buffer amplifier unit includes a MOSFET as an input circuit,

a gate of the MOSFET is connected to an input terminal of the first buffer amplifier unit, and

a substrate of the MOSFET is connected to an output terminal of the first buffer amplifier unit.

7. The capacitance detection circuit according to claim 1, further comprising:

a testing terminal for an input of a testing signal; and

a testing capacitor and a switch connected in series between the input terminal of the first buffer amplifier unit and the testing terminal.

8. The capacitance detection circuit according to claim 7,

wherein the testing capacitor, the switch, and the first buffer amplifier are connected so that the capacitor to be detected can be connected, via the switch, between the input terminal and the output terminal of the first buffer amplifier.

9. The capacitance detection circuit according to claim 1, further comprising an AC power supply,

wherein the capacitor to be detected is connected between the signal wire and an output terminal of the AC power supply.

10. The capacitance detection circuit according to claim 9, further comprising:

a first high pass filter connected between the first buffer amplifier and the first junction point; and

a second high pass filter connected between the first buffer amplifier and the second junction point,

wherein the first high pass filter and the second high pass filter pass frequency elements corresponding to an AC voltage outputted from the AC power supply and to varying capacitance of the capacitor for detection, wherein the frequency elements are included in a signal outputted from the first buffer amplifier.

11. A circuit that detects a capacitance of a capacitor, comprising:

a first buffer amplifier, wherein an input of said first buffer amplifier is connected to the capacitor to be detected by a signal wire, and wherein the voltage gain of the said first buffer amplifier is unity;

a first diode and a second diode connected in series between the signal wire and a first power supply, connected so that a current flows from the signal wire to the first power supply via the first and second diodes;

a third diode and a fourth diode connected in series between the signal wire and a second power supply, connected so that a current flows from the second power supply to the signal wire via the third and fourth diodes; and

a resistor connected between the signal wire and a voltage that is equal to or lower in value than a voltage of the first power supply and equal to or higher than a voltage of the second power supply,

wherein;

an output terminal of the buffer amplifier is connected to a first junction point of the first diode and the second diode via a first capacitance, and to a second junction point of the third diode and the fourth diode via a second capacitance;

the first junction point is connected to a point having a voltage, the value of which is between the voltage of the first power supply and the voltage of the signal wire, via a first resistor; and

the second junction point is connected to a point having voltage, the value of which is between the voltage of the second power supply and the voltage of the signal wire, via a second resistor.

12. A circuit that detects a capacitance of a capacitor, comprising:

a first buffer amplifier, wherein an input of said first buffer amplifier is connected to the capacitor to be detected by a signal wire, and wherein the voltage gain of the first buffer amplifier is unity;

a first diode and a second diode connected in series between the signal wire and a first power supply, connected so that a current flows from the signal wire to the first power supply via the first and second diodes;

a third diode and a fourth diode connected in series between the signal wire and a second power supply, connected so that a current flows from the second power supply to the signal wire via the third and fourth diodes; and

a resistor connected between the signal wire and a voltage, the value of which is equal to or lower in value than a voltage of the first power supply and equal to or higher than a voltage of the second power supply,

a capacitor connected between an output terminal of the first buffer amplifier and a first junction point of the first diode and the second diode;

a resistor connected to the first junction point and to a point maintained at a voltage, the value of which is between the voltage of the first power supply and the voltage of the signal wire;

a capacitor connected between the output terminal of the first buffer amplifier and a second junction point of the third diode and the fourth diode; and

a resistor connected to the second junction point and to a point maintained at a voltage, the value of which is between the voltage of the second power supply and the voltage of the signal wire.

13. A circuit that detects a capacitance of a capacitor, comprising:

a first buffer amplifier, wherein an input of said first buffer amplifier is connected to the capacitor to be detected by a signal wire, and wherein the voltage gain of the first buffer amplifier is unity;

a first diode and a second diode connected in series between the signal wire and a first power supply, connected so that a current flows from the signal wire to the first power supply via the first and second diodes;

a third diode and a fourth diode connected in series between the signal wire and a second power supply, connected so that a current flows from the second power supply to the signal wire via the third and fourth diodes; and

a first capacitor and a second buffer amplifier connected in series between an output terminal of the first buffer amplifier and a first junction point of the first diode and the second diode;

a first resistor connected to a junction point of the first capacitor and the second buffer amplifier and connected to a point maintained at a voltage, the value of which is between a voltage of the first power supply and a voltage of the signal wire;

a second capacitor and a third buffer amplifier connected in series between the output terminal of the first buffer amplifier and a second junction point of the third diode and fourth diode;

a second resistor connected to a junction point of the second capacitor and the third buffer amplifier and to a point maintained at a voltage, the value of which is between a voltage of the second power supply and the voltage of the signal wire; and

a third resistor connected between the signal wire and a voltage maintained at a value that is equal to or lower than the voltage of the first power supply, and equal to or higher than the voltage of the second power supply.

14. A method that detects capacitance of a capacitor, comprising:

connecting the capacitor to be detected and an input of a first buffer amplifier wherein the voltage gain of the first buffer amplifier is unity, via a signal wire;

connecting a first diode and a second diode in series between the signal wire and a first power supply and connecting a third diode and a fourth diode in series between the signal wire and a second power supply; and

canceling capacitance of the first diode and the third diode connected to the signal wire by connecting an output terminal of the buffer amplifier to a junction point of the first diode and the second diode via a first capacitance and to a junction point of the third diode and the fourth diode via a second capacitance;

wherein the first junction point is connected to a point maintained at a voltage, the value of which is between a voltage of the first power supply and a voltage of the signal wire, via a first resistor; and

the second junction point is connected to a point maintained at a voltage, the value of which is between a voltage of the second power supply and the voltage of the signal wire, via a second resistor.