Method of manufacturing a micropump check valve
First Claim
1. A method of manufacturing a micropump check valve arranged in a flow path for permitting fluid flow therethrough by pressure change, the method comprising:
- forming a valve part and a valve-supporting part in a valve forming member;
forming a flow path hole for such fluid in a valve receiving member including a valve receptor for receiving the valve part;
bonding the valve forming member and the valve receiving member together, such that the valve part covers a flow path hole and is adjacent to and contacting the valve receptor, thereby closing the flow path hole; and
after bonding, applying pressure to a side of the valve receptor opposite the valve part, thereby projecting the valve receptor towards the valve part and deforming the valve receiving member toward the valve part.
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Accused Products
Abstract
The invention provides a method capable of manufacturing a micropump check valve, inexpensively and without much trouble or time, which does not cause disadvantages even if a material that dissolves an adhesive is contained in the fluid, and which allows bonding with high accuracy. After a valve forming member and a valve receiving member are bonded, a valve receptor is projected towards a valve part and pretension is applied. Thus, the valve forming member and the valve receiving member can be satisfactorily bonded through a solid phase diffusion bonding method and the like using a relatively inexpensive material, such as stainless steel, without using an adhesive, and the pretension is not reduced when in the annealing state.
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Citations
6 Claims
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1. A method of manufacturing a micropump check valve arranged in a flow path for permitting fluid flow therethrough by pressure change, the method comprising:
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forming a valve part and a valve-supporting part in a valve forming member; forming a flow path hole for such fluid in a valve receiving member including a valve receptor for receiving the valve part; bonding the valve forming member and the valve receiving member together, such that the valve part covers a flow path hole and is adjacent to and contacting the valve receptor, thereby closing the flow path hole; and after bonding, applying pressure to a side of the valve receptor opposite the valve part, thereby projecting the valve receptor towards the valve part and deforming the valve receiving member toward the valve part. - View Dependent Claims (2, 3, 4, 5, 6)
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Specification