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Method of manufacturing a micropump check valve

  • US 7,565,744 B2
  • Filed: 01/13/2005
  • Issued: 07/28/2009
  • Est. Priority Date: 01/21/2004
  • Status: Expired due to Fees
First Claim
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1. A method of manufacturing a micropump check valve arranged in a flow path for permitting fluid flow therethrough by pressure change, the method comprising:

  • forming a valve part and a valve-supporting part in a valve forming member;

    forming a flow path hole for such fluid in a valve receiving member including a valve receptor for receiving the valve part;

    bonding the valve forming member and the valve receiving member together, such that the valve part covers a flow path hole and is adjacent to and contacting the valve receptor, thereby closing the flow path hole; and

    after bonding, applying pressure to a side of the valve receptor opposite the valve part, thereby projecting the valve receptor towards the valve part and deforming the valve receiving member toward the valve part.

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