Two-part microprobes for contacting electronic components and methods for making such probes
First Claim
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1. A probe mounted to a substrate for testing semiconductor devices, comprising:
- (a) a substrate;
(b) a mounting element affixed to the substrate;
(c) a probe element comprising a body portion, having a distal end connected to a tip portion, and a proximal end connected to a base portion;
wherein the base portion and the mounting element have at least some substantially complementary features which allow aligned and retained mating of the probe to the mounting element; and
wherein the probe element and the mounting element are engaged with one another through at least two non-parallel motions of the probe element relative to both the mounting element and the substrate to which the mounting element is mounted.
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Abstract
Embodiments disclosed herein are directed to compliant probe structures for making temporary or permanent contact with electronic circuits and the like. In particular, embodiments are directed to various designs of two-part probe elements, socket-able probes and their mounts. Some embodiments are directed to methods for fabricating such probes and mounts. In some embodiments, for example, probes have slide in mounting structures, twist in mounting structures, mounting structures that include compliant elements, and the like.
75 Citations
7 Claims
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1. A probe mounted to a substrate for testing semiconductor devices, comprising:
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(a) a substrate; (b) a mounting element affixed to the substrate; (c) a probe element comprising a body portion, having a distal end connected to a tip portion, and a proximal end connected to a base portion; wherein the base portion and the mounting element have at least some substantially complementary features which allow aligned and retained mating of the probe to the mounting element; and wherein the probe element and the mounting element are engaged with one another through at least two non-parallel motions of the probe element relative to both the mounting element and the substrate to which the mounting element is mounted. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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Specification