Dielectric actuator or sensor structure and method of making it

• US 7,573,064 B2
• Filed: 12/17/2002
• Issued: 08/11/2009
• Est. Priority Date: 12/21/2001
• Status: Expired due to Term

• Current Assignee: Danfoss A/S
• Original Assignee: Danfoss A/S
• Inventors: Benslimane, Mohamed Yahia, Gravesen, Peter
• Primary Examiner(s): LOUIE, WAI SING
• Application Number:
  US10/499,429
• Publication Number:
  US 20050104145A1
• Time in Patent Office: 2,429 Days
• Field of Search: 257/306, 257/480, 257/486, 257/499, 257/48
• US Class Current: 257/48
• CPC Class Codes: G01L 1/142 using capacitors
• CPC Class Codes: H02N 1/002 Electrostatic motors
• CPC Class Codes: H10N 30/084 by moulding or extrusion
• CPC Class Codes: H10N 30/206 using only longitudinal or thickness displacement, e.g. d33 or d31 type devices

Abstract

The present invention relates to dielectric actuators or sensors of the kind wherein electrostatic attraction between two electrodes located on an elastomeric body leads to a compression of the body in a first direction and a corresponding extension of the body in a second direction. The dielectric actuator/sensor structure comprises a first sheet of elastomeric material having at least one smooth surface and a second surface and a second sheet of elastomeric material having at least one smooth surface and a second surface. The sheets are laminated together with their second surfaces exposed, and there is provided a first electrode on the second surface of the first sheet and second electrode on the second surface of the second sheet.

Claims

1. A dielectric actuator/sensor structure comprising:

A first sheet of elastomeric material having at least one smooth surface and a second surface;

A second sheet of elastomeric material having at least one smooth surface and a second surface;

The sheets being laminated together with their second surfaces exposed;

A first electrode being deposited on the second surface of the first sheet; and

A second electrode being deposited on the second surface of the second sheet;

wherein the first and second sheets are formed of the same elastomeric material; and

wherein at least one of the second surfaces is corrugated.

2. a dielectric actuator/sensor structure as in claim 1, wherein both of the second surfaces are corrugated.

3. The dielectric actuator/sensor structure according to claim 1, wherein at least one of the first and second electrode consists essentially of a deposit of metal, such as silver, which has been deposited by vapor deposition or by an electrolytic process.

4. The dielectric actuator/sensor structure according to claim 1, wherein at least one of the first and second sheet of elastomeric material consists essentially of silicone rubber.

5. The dielectric actuator/sensor structure according to claim 2, wherein the peak-to-peak amplitude of the corrugations is between 1 and 10 micrometers.

6. The dielectric actuator/sensor structure according to claim 1, wherein the electrodes have a thickness of about 20-100 nanometers.

8. The dielectric actuator/sensor structure according to claim 1, wherein the second surfaces are substantially covered by the deposited first and second electrodes.

9. The dielectric actuator/sensor structure according to claim 2, wherein the corrugated second surfaces are disposed such that the corrugations are substantially aligned.

7. A dielectric actuator/sensor structure comprising:

a first sheet of elastomeric material having at least one smooth surface and a second surface;

a second sheet of elastomeric material having at least one smooth surface and a second surface;

the sheets being laminated together with their second surfaces exposed;

a first electrode being deposited on the second surface of the first sheet; and

a second electrode being deposited on the second surface of the second sheet;

wherein the first sheet with its respective first electrode is substantially identical to the second sheet with its respective second electrode.

10. A dielectric actuator/sensor structure comprising:

a first sheet of elastomeric material having at least one smooth surface and a second surface;

a second sheet of elastomeric material having at least one smooth surface and a second surface;

the sheets being laminated together with their second surfaces exposed;

a first electrode being deposited on the second surface of the first sheet; and

a second electrode being deposited on the second surface of the second sheet;

wherein the second surfaces, and the deposited first and second electrodes, are corrugated.