Reduction of fit error due to non-uniform sample distribution

• US 7,583,359 B2
• Filed: 05/05/2006
• Issued: 09/01/2009
• Est. Priority Date: 05/05/2006
• Status: Active Grant

• Current Assignee: ASML Netherlands BV (ASML Holding NV)
• Original Assignee: ASML Netherlands BV (ASML Holding NV)
• Inventors: Moest, Bearrach
• Primary Examiner(s): Kim; Peter B
• Application Number:
  US11/418,464
• Publication Number:
  US 20070258074A1
• Time in Patent Office: 1,215 Days
• Field of Search: 355/53, 355/55, 355/72, 355/75, 430/30, 702/94, 356/399, 356/400, 356/401
• US Class Current: 355/55
• CPC Class Codes: G03F 9/7011 Pre-exposure scan; original with original holder alignment; Prealignment, i.e. workpiece with workpiece holder
• CPC Class Codes: G03F 9/7092 Signal processing

Abstract

A weighted fit based on a sample density of a plurality of samples is used to determine an alignment curve. A scan that produces the samples may include portions having greater and lesser sample density. While performing an interpolation to produce a best fit curve, a plurality of neighboring samples are chosen for each sample point, for sample points associated with a value above a threshold. A weighting function may be performed based on a distance between a given sample and the chosen nearest neighbors, wherein measurements that are taken in a region with denser samples are given less weight than measurements that are taken in a region with sparser samples.

Claims

1. An alignment method for a lithography apparatus, comprising:

determining a plurality of data points associated with an object that moves with a wafer table, the data points including a position and radiation intensity associated with the position; and

performing an interpolation of the plurality of data points to produce a best fit curve, wherein the performing the interpolation comprises adjusting a weighting assigned to the plurality of data points during the interpolation to provide less weight to the densely spaced data points and more weight to the sparsely spaced data points.

2. The method of claim 1, wherein the performing the interpolation further comprises:

choosing a threshold value of radiation intensity;

selecting a plurality of data points, wherein each data point corresponds to a radiation intensity above the threshold value; and

choosing a plurality of neighboring data points near the each data point to perform the adjusting the weighting.

3. The method of claim 2, wherein the plurality of neighboring data points is less than about ten data points.

4. The method of claim 1, wherein movement of the object is characterized by a perturbation to a nominally linear velocity.

5. The method of claim 1, wherein performing the fit includes performing a parabolic interpolation.

6. The method of claim 1, wherein the object is one of a grating, a detector, and an image sensor.

7. The method of claim 1, wherein the plurality of data points is determined using transmitted image sensor marks of a transmitted image sensor.

8. The method of claim 1, wherein the best fit curve comprises a one-dimensional curve that includes the plurality of data points.

9. The method of claim 7, wherein a position of maximum alignment corresponds to a maximum intensity detected by the transmitted image sensor.

10. The method of claim 1, further comprising:

calculating a peak position of the best fit curve; and

determining the alignment position based on the peak position.

11. The method of claim 10, wherein the peak position of the best fit curve more closely approximates the position of maximum alignment than a peak position of a fit curve constructed without the adjusting the weighting assigned to the plurality of data points.

12. The method of claim 1, further comprising selecting a data point associated with a highest radiation intensity and two neighboring data points.

13. A device for generating an alignment curve in a lithographic apparatus, comprising:

a mask table constructed and arranged to support a mask;

a wafer table constructed and arranged to support a wafer;

a projection system; and

a control system configured (i) to generate a plurality of data points from radiation intensity measurements generated during a water scan, (ii) to perform an interpolation of the plurality of the data points to produce a best fit curve, and (iii) to adjust a weighting assigned to the plurality of data points during the interpolation to provide less weight to the densely spaced data points and more weight to the sparse data points.

14. The device of claim 13, wherein the control system is further configured to select the plurality of data points based on a radiation intensity threshold.

15. The device of claim 13, wherein the control system is configured to perform a parabolic interpolation.

16. The device of claim 13, wherein the control system is configured to generate a one-dimensional curve that includes the plurality of data points.

17. The device of claim 13, wherein the mask includes a transmission image sensor marker.

18. A method for controlling overlay in a lithography system, comprising:

performing a one dimensional (1-D) scan using an image sensor within a plane of best focus;

generating a set of data points based the 1-D scan, each data point representing a measured intensity and position;

generating a best fit curve based on a density-weighted fit applied to the set of data points; and

determining a position of maximum intensity corresponding to optimum alignment based on a peak position of the best fit curve.

19. The method of claim 18, further comprising determining a plane of best focus before performing the 1-D scan.

20. The method of claim 18, wherein the generating the best fit curve comprises according a greater weight to sparse data points than to dense data points.

21. The method of claim 18, wherein the image sensor is a transmitted image sensor.

22. A system for controlling overlay in a lithography apparatus, comprising:

a mask table constructed and arranged to support a mask;

a wafer table constructed and arranged to support a wafer;

an image sensor that moves in concert with the wafer table and is configured to determine an alignment position based on a peak in detected light intensity;

a projection system; and

a control system configured (i) to generate a plurality of data points generated during a wafer scan using the image sensor, (ii) to perform an interpolation of the plurality of data points to produce a best fit curve, and (iii) to adjust a weight assigned to the plurality of data points during the interpolation to provide less weight to the dense data points and more weight to the sparse data points.

23. The system of claim 22, wherein the system is further configured to select the plurality of data points based on a radiation intensity threshold.

24. The system of claim 22, wherein the image sensor is a transmitted image sensor.

25. The system of claim 22, wherein the image sensor is further configured to detect a best focus condition based on a vertical scan.

26. The system of claim 22, wherein the plurality of data points are characterized by a perturbation in sample spacing, the perturbation having a relative frequency corresponding to deviations of wafer table speed from a nominal speed during the wafer scan.

27. The system of claim 26, wherein the relative frequency is less than about twenty, and wherein fit errors using the interpolation to provide less weight to the dense data points and more weight to the sparse data points are on average less than fit errors determined without the interpolation.