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Monitoring device for transport pods

  • US 7,605,718 B2
  • Filed: 07/11/2005
  • Issued: 10/20/2009
  • Est. Priority Date: 07/11/2004
  • Status: Active Grant
First Claim
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1. A monitoring device for silicon wafer transfer pods, comprising:

  • a top part;

    a cylinder in communication with said top part;

    a bottom part in communication with said cylinder;

    a control unit in communication with said cylinder;

    a particle detector in communication with said control unit, said particle detector facilitating the monitoring;

    a wireless link in communication with said control unit; and

    wherein said top part and said bottom part are configured to fit inside the silicon wafer transfer pods.

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