Data processing equipment, inspection assistance system, and data processing method

• US 7,606,409 B2
• Filed: 11/15/2005
• Issued: 10/20/2009
• Est. Priority Date: 11/19/2004
• Status: Active Grant

• Current Assignee: Hitachi High-Technologies Corporation (Hitachi, Ltd.)
• Original Assignee: Hitachi High-Technologies Corporation (Hitachi, Ltd.)
• Inventors: Funakoshi, Tomohiro
• Primary Examiner(s): COUSO, YON JUNG
• Application Number:
  US11/272,896
• Publication Number:
  US 20060111879A1
• Time in Patent Office: 1,435 Days
• Field of Search: 382/141, 382/144, 382/145, 382/149, 382/150, 382/224, 382/100, 348 86- 92, 348/125, 348/126, 348/129, 703/1
• US Class Current: 382/141
• CPC Class Codes: G07C 3/146 during manufacturing process

Abstract

A data processing apparatus, which is connected to an inspection tool and an review tool via a network, automatically receives inspection result file regarding defect information from the inspection tool and image information from the review tool. Moreover, the data processing apparatus makes comparative check between the defect, image, and attribute information outputted from the inspection tool and the defect, image, and attribute information observed in the review tool. Finally, the data processing apparatus displays, on its window, both of the above-described information in a manner of being organized and arranged side by side.

Claims

1. A data processing apparatus configured to be connectable to an inspection tool for detecting defects of a target and a review tool for acquiring images of outward appearance of the defects via a communication network,

wherein said data processing apparatus is configured to:

receive first defect information including coordinate information with regard to the defects detected by said inspection tool under a plurality of inspection conditions from said inspection tool;

receive second defect information being acquired by said review tool based on said coordinate information from said review tool; and

display, on a display window of the data processing apparatus, the first defect information from said inspection tool and the second defect information from said review tool side by side in such a manner that images with regard to the defects which have been detected under the plurality of inspection conditions and judged to be the same defect based on the coordinate information are arranged in a same column or row.

2. The data processing apparatus according to claim 1, wherein said data processing apparatus is configured to select at least one selection condition used when selecting at least one of the first and second defect information to be displayed on said display window, or arbitrarily combine selection conditions through said selection.

3. The data processing apparatus according to claim 2, wherein at least said one selection condition is selected based on coordinate data on said defects detected by said inspection tool.

4. The data processing apparatus according to claim 2, wherein at least said one selection condition is determined based on the presence or absence of said images of said defects acquired by said review tool.

5. The data processing apparatus according to claim 1, wherein said data processing apparatus is configured to display, on said display window, defect attribute parameters of said defects as the first defect information outputted from said inspection tool.

6. The data processing apparatus according to claim 5, wherein said defect attribute parameters are acquired using a plurality of inspection conditions.

7. The data processing apparatus according to claim 1, wherein said data processing apparatus is configured to display, on said display window, said images of said defects as the first defect information outputted from said inspection tool.

8. The data processing apparatus according to claim 7, wherein said images of said defects are acquired using a plurality of inspection conditions.

9. The data processing apparatus according to claim 1, wherein said data processing apparatus is configured to display, on said display window, classification information on said defects classified by said review tool based on the first defect information from said inspection tool.

10. The data processing apparatus according to claim 1, wherein:

said first defect information outputted from said inspection tool includes at least said images and attribute parameters of said defects of said target to be detected,

said review tool is configured to classify said defects based on the first defect information, and

said second defect information from said review tool including said images includes classification information on said defects.

11. The data processing apparatus according to claim 1, wherein the first defect information from said inspection tool to be displayed on said display window corresponds to information of the defect which said review tool acquires.

18. The data processing apparatus according to claim 1, said images include an image transmitted from said inspection tool and an image transmitted from said review tool.

12. An inspection-operation assistance system, comprising:

an inspection tool for detecting defects of a target to be detected under a plurality of inspection conditions, and outputting first defect information including coordinate information,

a review tool for acquiring images of outward appearance of said defects based on said coordinate information, and

a data processing apparatus for performing transfer/reception of information and images with said inspection tool and said review tool, and displaying, on a display window of the data processing apparatus, the first defect information from said inspection tool and second defect information from said review tool side by side in such a manner that images with regard to the defects which have been detected under said plurality of inspection conditions and judged to be the same defect based on the coordinate information are arranged in a same column or row.

13. The inspection-operation assistance system according to claim 12, wherein the first defect information outputted from said inspection tool includes at least said images and attribute parameters of said defects of said target to be detected,

said review tool classifying said defects based on the first defect information,

the second defect information from said review tool including said images including classification information on said defects.

14. The inspection-operation assistance system according to claim 12, wherein the first defect information from said inspection tool to be displayed on said display window corresponds to information of the defect which said review tool acquires.

19. The inspection-operation assistance system according to claim 12, said images include an image transmitted from said inspection tool and an image transmitted from said review tool.

15. A data processing method, comprising the steps of:

performing transfer/reception of information and images with a review tool and an inspection tool via a communication network, said review tool being configured to acquire images of outward appearance of defects based on first defect information including coordinate information under a plurality of inspection conditions output from the inspection tool, said inspection tool being configured to detect said defects of a target to be detected under the plurality of inspection conditions and output the first defect information, and

displaying, on a display window of a data processing apparatus, the first defect information from said inspection tool and second defect information from said review tool side by side by side in such a manner images with regard to the defects which have been detected under the plurality of inspection conditions and judged to be the same defect based on the coordinate information are arranged in a same column or row.

16. The data processing method according to claim 15, wherein:

the first defect information outputted from said inspection tool includes at least said images and attribute parameters of said defects of said target to be detected,

said review tool is configured to classify said defects based on the first defect information,

the second defect information from said review tool including said images includes classification information on said defects.

17. The data processing method according to claim 15, wherein the first defect information from said inspection tool to be displayed on said display window corresponds to information of the defect which said review tool acquires.

20. The data processing method according to claim 15, said images include an image transmitted from said inspection tool and an image transmitted from said review tool.