Multi-state memory cell with asymmetric charge trapping

• US 7,616,482 B2
• Filed: 05/11/2006
• Issued: 11/10/2009
• Est. Priority Date: 02/24/2004
• Status: Active Grant

• Current Assignee: Micron Technology, Inc.
• Original Assignee: Micron Technology, Inc.
• Inventors: Prall, Kirk
• Primary Examiner(s): Nguyen; Tuan T
• Assistant Examiner(s): Sofocleous; Alexander
• Application Number:
  US11/432,019
• Publication Number:
  US 20060203554A1
• Time in Patent Office: 1,279 Days
• Field of Search: 365/185.03, 365/185.18, 365/185.28, 365/185.17
• US Class Current: 365/185.03
• CPC Class Codes: H01L 29/7887 Programmable transistors with more than two possible different levels of programmation
• CPC Class Codes: H01L 29/7923 Programmable transistors with more than two possible different levels of programmation

Abstract

A multi-state NAND memory cell includes two drain/source areas in a substrate. An oxide-nitride-oxide structure is formed above the substrate between the drain/source areas. The nitride layer acting as an asymmetric charge trapping layer. A control gate is located above the oxide-nitride-oxide structure. An asymmetrical bias on the drain/source areas causes the drain/source area with the higher voltage to inject an asymmetric distribution hole by gate induced drain leakage injection into the trapping layer substantially adjacent that drain/source area.

Claims

1. A method for programming a multi-state NAND memory cell having a control gate, first and second active areas, and a single, continuous nitride trapping layer formed at least a length of the control gate and configured for asymmetrical trapping near each of the active areas, the method comprising:

applying a negative gate voltage, in a range of −

10V to −

15V, to the control gate;

grounding the second active area; and

applying a positive voltage to the first active area to inject an asymmetric distribution hole by gate induced drain leakage injection into the single, continuous nitride trapping layer substantially adjacent the first active area.

2. The method of claim 1 and further including:

grounding the first active area; and

applying a positive voltage to the second active area to inject an asymmetric distribution hole by gate induced drain leakage injection into the trapping layer substantially adjacent the second active area.

3. The method of claim 1 wherein the trapping layer is a discontinuous trapping layer that is divided by an extension of the control gate.

4. A method for programming a multi-state NAND memory cell having a control gate, first and second source/drain regions, and a single, continuous nitride trapping layer formed at least a length of the control gate and configured for asymmetrical trapping of first and second data bits near each of the source/drain regions, the method comprising:

applying a voltage, in a range of −

10V to −

15V, to the control gate; and

applying asymmetrical voltages to the first and second source/drain regions to program the first and second data bits.

5. The method of claim 4 wherein the first source/drain region is biased at 5V and the second source/drain region is biased at ground potential.

6. The method of claim 4 wherein a voltage on the first source/drain region injects holes into the trapping layer near the first source/drain region.

7. The method of claim 6 wherein injected holes neutralize electrons from a previous erased condition to reduce a threshold voltage of the memory cell.

8. The method of claim 6 wherein a ground potential on the second source/drain region does not inject holes into the trapping layer near the second source/drain region.

9. The method of claim 4 and further including aluminum oxide formed between the trapping layer and the control gate and between the trapping layer and a substrate.

10. The method of claim 4 wherein the memory cell is part of a memory array comprising a plurality of memory cells.

11. The method of claim 10 wherein the memory array is part of a NAND flash memory device.