Systems and methods of testing micro-electromechanical devices
First Claim
1. A system comprising:
- an array of micro-electromechanical (MEM) structures, each MEM structure having a MEM device; and
,a testing system situated outside of the array of the MEM structures configured to test one or more of the MEM structures for proper operation without directly reading the MEM device of the one or more MEM structures being tested.
3 Assignments
0 Petitions
Accused Products
Abstract
An interference modulator (Imod) incorporates anti-reflection coatings and/or micro-fabricated supplemental lighting sources. An efficient drive scheme is provided for matrix addressed arrays of IMods or other micromechanical devices. An improved color scheme provides greater flexibility. Electronic hardware can be field reconfigured to accommodate different display formats and/or application functions. An IMod'"'"'s electromechanical behavior can be decoupled from its optical behavior. An improved actuation means is provided, some one of which may be hidden from view. An IMod or IMod array is fabricated and used in conjunction with a MEMS switch or switch array. An IMod can be used for optical switching and modulation. Some IMods incorporate 2-D and 3-D photonic structures. A variety of applications for the modulation of light are discussed. A MEMS manufacturing and packaging approach is provided based on a continuous web fed process. IMods can be used as test structures for the evaluation of residual stress in deposited materials.
55 Citations
30 Claims
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1. A system comprising:
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an array of micro-electromechanical (MEM) structures, each MEM structure having a MEM device; and
,a testing system situated outside of the array of the MEM structures configured to test one or more of the MEM structures for proper operation without directly reading the MEM device of the one or more MEM structures being tested. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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23. A system comprising:
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an array of nodes organized into rows and columns, each node having a micro-electromechanical (MEM) device, a first switch coupling a column line to the MEM device and a second switch coupling a voltage to the MEM device; and
,a testing mechanism situated outside of the array of nodes to test each node for proper operation by selecting a row and a column of the nodes in which the node is located to turn on the first and the second switches of the node. - View Dependent Claims (24, 25, 26, 27, 28)
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29. A system comprising:
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an array of micro-electromechanical (MEM) device assemblies, each MEM device assembly including a MEM device capable of being individually written to but incapable of being electrically read; and
,means for testing each MEM device assembly for proper operation without directly reading the MEM device of the MEM device assembly. - View Dependent Claims (30)
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Specification