Electrostatic chuck and manufacturing method thereof

• US 7,633,738 B2
• Filed: 10/30/2007
• Issued: 12/15/2009
• Est. Priority Date: 11/01/2006
• Status: Active Grant

• Current Assignee: NGK Insulators Limited
• Original Assignee: NGK Insulators Limited
• Inventors: Hattori, Akiyoshi
• Primary Examiner(s): Leja; Ronald W
• Application Number:
  US11/980,007
• Publication Number:
  US 20080100985A1
• Time in Patent Office: 777 Days
• Field of Search: 361/234
• US Class Current: 361/234
• CPC Class Codes: H01L 21/6831 using electrostatic chucks

Abstract

An electrostatic chuck includes a base, and includes an electrode embedded in the base in parallel to a substrate mounting surface of the base. A terminal loaded into a terminal hole drilled into a back surface of the base toward the electrode is bonded to the electrode having a protruded portion with a substantially conical trapezoidal shape, which is formed on a flat surface on the terminal side of the electrode toward the terminal hole. In the protruded portion, an angle made by the flat surface on the terminal side of the electrode and an inclined surface of the protruded portion is 40° or less, and a distance from the flat surface of the electrode to a terminal-bonding surface of the protruded portion is 0.01 to 0.8 mm.

Claims

1. An electrostatic chuck, comprising:

a base made of substantially disc-like alumina ceramics and having a substrate mounting surface;

an electrode embedded in the base in parallel to the substrate mounting surface of the base; and

a terminal loaded into a terminal hole drilled toward the electrode from the opposite side surface of the substrate mounting surface of the base,

wherein the electrode has approximately constant thickness and includes, at a portion thereof facing the terminal hole, a protruded portion with a substantially conical trapezoidal shape, the protruded portion being made of the same type of material as the electrode and having a first surface bonded to an end surface of the terminal,

wherein the diameter of the end surface of the terminal that is bonded to the first surface of the protruded portion is larger than the diameter of the first surface of the protruded portion, and

wherein in the protruded portion, an angle made by a flat surface on the terminal side of the electrode, from which the protruded portion is protruded, and an inclined surface of the protruded portion is 40°

or less, and a distance from the flat surface on the terminal side of the electrode to the first surface of the protruded portion is 0.01 mm to less than 0.8 mm.

2. The electrostatic chuck according to claim 1, wherein said distance is 0.02 to 0.4 mm.

3. The electrostatic chuck according to claim 1, wherein the diameter of a second surface, opposed to said first surface of the protruded portion is 2 to 6 mm.

4. The electrostatic chuck according to claim 1, wherein the electrode contains conductive powder and 5 to 20 vol % of alumina powder.

5. The electrostatic chuck according to claim 1, wherein an outer annular section of said end surface of the terminal is in direct contact with a portion of the base.

6. A manufacturing method of an electrostatic chuck, comprising the steps of:

fabricating an alumina sintered body of a portion of a dielectric layer including a substrate mounting surface, the portion belonging to a base;

forming a flat electrode having approximately constant thickness, on a surface of the alumina sintered body;

forming a protruded portion, having a substantially conical trapezoidal shape, made of the same type of material as the electrode on a part of the flat electrode so that a thickness of the protruded portion is 0.8 mm or less and that an angle made by the flat surface on the terminal side of the electrode and an inclined surface of the protruded portion is 40°

or less;

forming a support portion of the base to cover the alumina sintered body and the electrode, and then integrally sintering the support portion and the portion of the dielectric layer;

drilling a terminal hole from the opposite side surface of the substrate mounting surface of the base toward the protruded portion to expose the protruded portion to a bottom surface of the terminal hole, and setting a distance of the protruded portion from the flat surface on the terminal side of the electrode to a bottom surface of the terminal hole at 0.01 mm to less than 0.8 mm;

loading the terminal into the terminal hole, wherein a diameter of an end surface of the terminal that is bonded to the protruded portion is larger than the diameter of a top surface of the protruded portion; and

bonding the terminal to the protruded portion by brazing.