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Mechanochemical sensor

  • US 7,650,804 B2
  • Filed: 07/27/2004
  • Issued: 01/26/2010
  • Est. Priority Date: 07/30/2003
  • Status: Expired due to Fees
First Claim
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1. A mechanochemical sensor comprising:

  • a minute mechanical structure body having a supporting portion and a pair of arms connected via elastic hinges to the support portion;

    a functional membrane that is connected to both arms;

    a detection means for detecting the change of a mechanical property of the functional membrane, the detection means including a force detection sensor that is connected to one of the arms; and

    an actuator for providing tension to the functional membrane, the actuator being connected to the other of the arms.

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