Selectable capacitance circuit
First Claim
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1. An apparatus having a selectable amount of capacitance, the apparatus comprising:
- at least two electrodes at least one of which is controllably movable with respect to the other to provide adjustability of a gap defined between the at least two electrodes, wherein at least one of the electrodes carries an RF signal, wherein the at least two electrodes comprise a first portion and a second portion;
wherein the first portion of at least one of the electrodes is configured to be tensioned by a first plurality of posts with a first post spacing, wherein the first plurality of posts are located between a substrate and at least one of the electrodes; and
wherein the second portion of at least one of the electrodes is configured to be tensioned by a second plurality of posts with a second post spacing, wherein the second plurality of posts are located between the substrate and at least one of the electrodes.
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Abstract
A voltage-controlled capacitor and methods for forming the same are described. A mechanical conductor membrane of the voltage-controlled capacitor is movable to and from a first position and a second position. An amount of capacitance can vary with the movement of the mechanical conductor membrane. A microelectromechanical systems (MEMS) voltage-controlled capacitor can be used in a variety of applications, such as, but not limited to, RF switches and RF attenuators.
427 Citations
21 Claims
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1. An apparatus having a selectable amount of capacitance, the apparatus comprising:
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at least two electrodes at least one of which is controllably movable with respect to the other to provide adjustability of a gap defined between the at least two electrodes, wherein at least one of the electrodes carries an RF signal, wherein the at least two electrodes comprise a first portion and a second portion; wherein the first portion of at least one of the electrodes is configured to be tensioned by a first plurality of posts with a first post spacing, wherein the first plurality of posts are located between a substrate and at least one of the electrodes; and wherein the second portion of at least one of the electrodes is configured to be tensioned by a second plurality of posts with a second post spacing, wherein the second plurality of posts are located between the substrate and at least one of the electrodes. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A capacitor having a selectable amount of capacitance, the capacitor comprising:
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means for carrying an RF signal, the carrying means having a controllably adjustable gap; and means for tensioning at least part of the carrying means, wherein the carrying means comprises a first portion and a second portion, wherein the first portion is configured to be tensioned by a first plurality of posts with a first post spacing, and wherein the second portion is configured to be tensioned by a second plurality of posts with a second post spacing wherein the carrying means comprises at least two electrodes, at least one of which is movable with respect to the other. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16)
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17. A method of selecting capacitance, the method comprising:
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adjusting a gap between at least two electrodes, wherein at least one of the electrodes carries an RF signal, wherein the at least two electrodes comprise a first portion and a second portion; and wherein the first portion is configured to be tensioned by a first plurality of posts with a first post spacing, and wherein the second portion is configured to be tensioned by a second plurality of posts with a second post spacing wherein adjusting the gap comprises adjusting a plurality of gaps between a conductive line configured to carry the RF signal and a plurality of electrodes. - View Dependent Claims (18)
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19. A method of manufacturing a capacitor having a selectable capacitance, the method comprising:
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forming a first electrode; forming a second electrode such that it is movable with respect to the first electrode to provide adjustability of a gap defined between the first electrode and the second electrode, wherein the first and second electrodes comprise a first portion and a second portion; and wherein the first portion is configured to be tensioned by a first plurality of posts with a first post spacing, and wherein the second portion is configured to be tensioned by a second plurality of posts with a second post spacing. - View Dependent Claims (20, 21)
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Specification