Selectable capacitance circuit
First Claim
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1. An RF device, comprising:
- a conductive line configured to carry an RF signal, wherein the conductive line carries a control signal; and
a deformable membrane having at least two actuatable positions for selectively capacitively filtering the RF signal, wherein the deformable membrane is capable of movement based on the control signal, wherein the deformable membrane comprises two or more separate membranes, wherein the RF device is configured such that at least one of the membranes comprises two or more portions, wherein the two or more portions are independently actuatable.
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Abstract
A voltage-controlled capacitor and methods for forming the same are described. A mechanical conductor membrane of the voltage-controlled capacitor is movable to and from a first position and a second position. An amount of capacitance can vary with the movement of the mechanical conductor membrane. A microelectromechanical systems (MEMS) voltage-controlled capacitor can be used in a variety of applications, such as, but not limited to, RF switches and RF attenuators.
55 Citations
7 Claims
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1. An RF device, comprising:
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a conductive line configured to carry an RF signal, wherein the conductive line carries a control signal; and a deformable membrane having at least two actuatable positions for selectively capacitively filtering the RF signal, wherein the deformable membrane is capable of movement based on the control signal, wherein the deformable membrane comprises two or more separate membranes, wherein the RF device is configured such that at least one of the membranes comprises two or more portions, wherein the two or more portions are independently actuatable. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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Specification