MEMS device fabricated on a pre-patterned substrate
First Claim
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1. A method of making a microelectromechanical systems device, comprising:
- providing a substrate having a plurality of trenches in a top surface of the substrate;
depositing a first electrode layer over the top surface of the substrate and onto bottom surfaces of the trenches, wherein the first electrode layer as deposited is discontinuous between the bottom surfaces of the trenches and the top surface of the substrate; and
forming a second electrode over the first electrode, wherein the first electrode layer and the second electrode have a first cavity therebetween.
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Abstract
A microelectromechanical systems device fabricated on a pre-patterned substrate having grooves formed therein. A lower electrode is deposited over the substrate and separated from an orthogonal upper electrode by a cavity. The upper electrode is configured to be movable to modulate light. A semi-reflective layer and a transparent material are formed over the movable upper electrode.
94 Citations
25 Claims
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1. A method of making a microelectromechanical systems device, comprising:
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providing a substrate having a plurality of trenches in a top surface of the substrate; depositing a first electrode layer over the top surface of the substrate and onto bottom surfaces of the trenches, wherein the first electrode layer as deposited is discontinuous between the bottom surfaces of the trenches and the top surface of the substrate; and forming a second electrode over the first electrode, wherein the first electrode layer and the second electrode have a first cavity therebetween. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A method of forming a microelectromechanical systems device, comprising:
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providing a substrate having a top surface, wherein a plurality of grooves is formed in the top surface; depositing at least one layer over the substrate, wherein the at least one layer comprises a first conductive material and is discontinuous at the grooves, forming rows of the layer between the grooves on the top surface; and depositing a second conductive material over the at least one layer, wherein the second conductive material is oriented orthogonally to the first conductive material on the top surface. - View Dependent Claims (19, 20, 21, 22, 23, 24, 25)
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Specification