Semiconductor device and inspection method of semiconductor device and wireless chip

• US 7,669,094 B2
• Filed: 07/28/2006
• Issued: 02/23/2010
• Est. Priority Date: 08/05/2005
• Status: Active Grant

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Dembo, Hiroki
• Primary Examiner(s): Ton; David
• Application Number:
  US11/494,466
• Publication Number:
  US 20070029994A1
• Time in Patent Office: 1,306 Days
• Field of Search: 438/153, 714/733, 714/718, 714/742, 340/514, 235/454
• US Class Current: 714/718
• CPC Class Codes: G01R 31/3025 Wireless interface with the DUT
• CPC Class Codes: G01R 31/31723 Hardware for routing the test signal within the device under test to the circuits to be tested, e.g. multiplexer for multiple core testing, accessing internal nodes routing the test signal to or from the device under test G01R31/31926

Abstract

The invention provides an inspection method of a semiconductor device which receives a test program wirelessly. As an inspection method of the semiconductor device, a test program is transmitted as a communication signal for every test. By transmitting a test program as a communication signal wirelessly in the case of an operation test, test contents are changed as required. As a result, a test program can be easily changed and an inspection circuit or the like is not required. In this manner, manufacturing cost of a wireless chip can be reduced.

Claims

1. A semiconductor device comprising:

an antenna;

a reception circuit operationally connected with the antenna;

a state control register operationally connected with the reception circuit; and

a data storing portion operationally connected with the state control register,

wherein the data storing portion, the reception circuit, and the state control register each comprises a thin film transistor;

wherein the data storing portion stores a test program received through the antenna by wireless communication; and

wherein the state control register becomes a test program executing state.

2. The semiconductor device according to claim 1, wherein the data storing portion includes a read only memory and a random access memory.

3. The semiconductor device according to claim 2, wherein data of the test program comprises a test routine for carrying out an operation test of the read only memory and the random access memory.

4. A semiconductor device comprising:

an RF circuit;

a reception circuit operationally connected with the RF circuit;

a state control register operationally connected with the reception circuit; and

a data storing portion operationally connected with the state control register;

wherein the data storing portion, the reception circuit, the state control register, and the RF circuit each comprises a thin film transistor;

wherein the data storing portion stores a test program received through the RF circuit by wireless communication; and

wherein the state control register becomes a test program executing state.

5. The semiconductor device according to claim 4, wherein the data storing portion includes a read only memory and a random access memory.

6. The semiconductor device according to claim 5, wherein data of the test program comprises a test routine for carrying out an operation test of the read only memory and the random access memory.

7. The semiconductor device according to claim 4, comprising:

an arithmetic circuit and a transmission circuit,

wherein the arithmetic circuit comprises a function to;

start the test program after the state control register becomes a test program executing state;

after the test program is terminated, set the state control register into a transmission processing state for processing transmission data so as to be suitable for a form of a communication signal, and thereafter output the transmission data to a modulation circuit by the transmission circuit; and

set the state control register into a reception processing state after a transmission is terminated.

8. An inspection method of a semiconductor device comprising:

starting an operation of an arithmetic circuit in accordance with a state of a state control register;

reading a test program stored in a data storing portion by the arithmetic circuit;

executing a test routine in accordance with the test program;

deciding an execution result of the test routine in accordance with the test program; and

writing the execution result to the data storing portion in accordance with the test program,

wherein the test program is received through an RF circuit.

9. An inspection method of a semiconductor device comprising:

starting a test program when or after a state control register becomes a test program executing state;

reading the test program from a data storing portion by an arithmetic circuit;

executing a test routine in accordance with the test program;

deciding an execution result of the test routine in accordance with the test program;

writing the execution result to the data storing portion in accordance with the test program;

setting the state control register to a transmission processing state when or after the test program is terminated; and

setting the state control register to a reception processing state by the arithmetic circuit after a transmission is terminated,

wherein the test program is received through an RF circuit.

10. An inspection method of a wireless chip comprising:

receiving a test program through an RF circuit;

storing the test program in a data storing portion; and

after an inspection is carried out by the test program, displaying a result of the inspection by a liquid crystal element.

11. The inspection method of a wireless chip, according to claim 10, wherein the liquid crystal element has a liquid crystal molecule sandwiched between substrates provided with a polarizing plate.

12. An inspection method of a wireless chip comprising:

receiving a test program through an RF circuit;

storing the test program in a data storing portion; and

after an inspection is carried out by the test program, deciding a result of the inspection by whether light from a laser light source is inputted to a light receptor or not.

13. The inspection method of a wireless chip, according to claim 12,

wherein a liquid crystal element is provided over the wireless chip, and

wherein the liquid crystal element comprise a liquid crystal molecule sandwiched between substrates provided with a polarizing plate.

14. A semiconductor device comprising:

an antenna;

a reception circuit operationally connected with the antenna;

a state control register operationally connected with the reception circuit; and

a data storing portion operationally connected with the state control register,

wherein the data storing portion, the reception circuit, and the state control register each comprises a thin film transistor;

wherein the data storing portion stores a test program received through the antenna by wireless communication for an operation test of the semiconductor device, and

wherein the state control register becomes a test program executing state.

15. The semiconductor device according to claim 14,

wherein the data storing portion includes a read only memory and a random access memory.

16. The semiconductor device according to claim 15,

wherein data of the test program comprises a test routine for carrying out an operation test of the read only memory and the random access memory.

17. A semiconductor device comprising:

an RF circuit;

a reception circuit operationally connected with the RF circuit;

a state control register operationally connected with the reception circuit; and

a data storing portion operationally connected with the state control register;

wherein the data storing portion, the reception circuit, the state control register, and the RF circuit each comprises a thin film transistor;

wherein the data storing portion stores a test program received through the RF circuit by wireless communication for an operation test of the semiconductor device; and

wherein the state control register becomes a test program executing state.

18. The semiconductor device according to claim 17,

wherein the data storing portion includes a read only memory and a random access memory.

19. The semiconductor device according to claim 18,

wherein data of the test program comprises a test routine for carrying out an operation test of the read only memory and the random access memory.

20. The semiconductor device according to claim 17, comprising:

an arithmetic circuit and a transmission circuit, wherein the arithmetic circuit comprises a function to;

start the test program after the state control register becomes a test program executing state;

after the test program is terminated, set the state control register into a transmission processing state for processing transmission data so as to be suitable for a form of a communication signal, and thereafter output the transmission data to a modulation circuit by the transmission circuit; and

set the state control register into a reception processing state after a transmission is terminated.