×

Composite sensor and acceleration sensor

  • US 7,677,100 B2
  • Filed: 08/29/2008
  • Issued: 03/16/2010
  • Est. Priority Date: 09/19/2007
  • Status: Expired due to Fees
First Claim
Patent Images

1. A composite sensor comprising:

  • a substrate;

    first supporting units provided on the substrate;

    a first vibrator facing the substrate with a gap therebetween;

    first supporting beams arranged to connect the first vibrator to the first supporting units and to support the first vibrator such that the first vibrator can vibrate in an X-axis direction among three axial directions including X, Y, and Z axes substantially perpendicular to each other;

    an angular-velocity-detecting vibrator provided to the first vibrator;

    angular-velocity-detecting supporting beams arranged to connect the angular-velocity-detecting vibrator to the first vibrator and to support the angular-velocity-detecting vibrator such that the angular-velocity-detecting vibrator can be displaced in one of the Y-axis direction and the Z-axis direction;

    a vibration generator enabling the first vibrator to vibrate in the X-axis direction;

    an angular-velocity-detecting displacement detector arranged to detect an amount of displacement when the angular-velocity-detecting vibrator is displaced in the one of the Y-axis direction and the Z-axis direction in a state in which the first vibrator is vibrating in the X-axis direction;

    second supporting units provided on the substrate;

    a second vibrator facing the substrate with a gap therebetween;

    second supporting beams connecting the second vibrator to the second supporting units and supporting the second vibrator such that the second vibrator can be displaced in one of the X-axis direction and the Y-axis direction;

    an acceleration-detecting displacement detector provided between the first and second vibrators and being arranged to detect an amount of displacement when the second vibrator is displaced in the one of the X-axis direction and the Y-axis direction;

    a vibration monitor arranged to monitor displacement of the first vibrator when the first vibrator vibrates in the X-axis direction; and

    an acceleration detector arranged to detect acceleration that acts on the second vibrator by performing synchronous detection on a displacement detection signal from the acceleration-detecting displacement detector using a monitor signal from the vibration monitor.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×