Compatible MEMS switch architecture
First Claim
Patent Images
1. A method of fabricating a display device, the method comprising:
- forming a switch comprising an electrode, a first contact, and a second contact, the switch responsive to voltages applied to the electrode to selectively place the first contact and the second contact in communication with one another, wherein the switch is formed by a first set of patterning steps; and
forming a plurality of display elements in parallel electrical communication with the switch, wherein the plurality of display elements is formed by a second set of patterning steps, the second set of patterning steps comprising the first set of patterning steps, wherein the first set of patterning steps comprises a first patterning step that forms the electrode and the second contact in the switch and that forms an electrode in each of the plurality of display elements.
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Abstract
A method of fabricating a display device includes forming a switch and forming a plurality of display elements in parallel electrical communication with the switch. The switch includes an electrode, a first contact, and a second contact. The switch is responsive to voltages applied to the electrode to selectively place the first contact and the second contact in communication with one another. Forming the switch includes a first set of patterning steps. Forming the plurality of display elements includes a second set of patterning steps. The second set of patterning steps includes the first set of patterning steps.
69 Citations
52 Claims
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1. A method of fabricating a display device, the method comprising:
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forming a switch comprising an electrode, a first contact, and a second contact, the switch responsive to voltages applied to the electrode to selectively place the first contact and the second contact in communication with one another, wherein the switch is formed by a first set of patterning steps; and forming a plurality of display elements in parallel electrical communication with the switch, wherein the plurality of display elements is formed by a second set of patterning steps, the second set of patterning steps comprising the first set of patterning steps, wherein the first set of patterning steps comprises a first patterning step that forms the electrode and the second contact in the switch and that forms an electrode in each of the plurality of display elements. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45)
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46. A method of fabricating a display device, the method comprising:
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forming a switch comprising a first electrode, an electrode structure comprising a second electrode, a first contact, and a second contact, the switch responsive to voltages applied to the first electrode in order to move the first contact into electrical communication with the second contact, the switch further responsive to voltages applied to the second electrode in order to move the first contact and the second contact out of electrical communication, wherein the second electrode is formed by a first set of patterning steps; and forming a plurality of display elements in parallel electrical communication with the switch, the plurality of display elements comprising a bus structure comprising a bus, wherein the bus structure is formed by a second set of patterning steps, the second set of patterning steps comprising the first set of patterning steps, wherein the first set of patterning steps comprises; the first patterning step that forms a sacrificial layer over the first contact in the switch and that forms a sacrificial layer over the display elements; and a second patterning step that forms the second electrode over the sacrificial layer in the switch and that forms the bus over the sacrificial layer in the display elements. - View Dependent Claims (47, 48, 49, 50, 51, 52)
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Specification