MEMS type thermally actuated out-of-plane lever
First Claim
1. A MEMS apparatus, comprising:
- a substrate defining a plane;
a pair of electrical contacts being disposed on the substrate;
a thermal arch beam being supported by and connecting between the contacts, the thermal arch beam includes a midpoint and a protrusion located at about the midpoint;
a lever including an axis of rotation and a bearing surface upon which the protrusion is operable to bear;
a pair of lever supports being disposed on the substrate for rotatably supporting the lever about the axis of rotation; and
an area of contact between the protrusion and the bearing surface being positioned vertically between the axis of rotation and the plane of the substrate,wherein a voltage difference between the pair of electrical contacts causes horizontal movement of the thermal arch beam in the plane and the protrusion bears against the lever causing rotation of the lever out of the plane.
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Accused Products
Abstract
A MEMS apparatus includes a substrate; electrical contacts disposed on the substrate; a thermal arch beam supported by and connected between the contacts, the thermal arch beam including a midpoint and a protrusion located at about the midpoint; a lever having an axis of rotation and a bearing surface upon which the protrusion is operable to bear, a pair of lever supports disposed on the substrate for rotatably supporting the lever about the axis of rotation, an area of contact between the protrusion and the bearing surface being positioned vertically between the axis of rotation and the plane of the substrate. A voltage difference between the electrical contacts causes the thermal arch beam to move horizontally in the plane and the protrusion to bear against the lever causing rotation of the lever out of the plane.
36 Citations
13 Claims
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1. A MEMS apparatus, comprising:
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a substrate defining a plane; a pair of electrical contacts being disposed on the substrate; a thermal arch beam being supported by and connecting between the contacts, the thermal arch beam includes a midpoint and a protrusion located at about the midpoint; a lever including an axis of rotation and a bearing surface upon which the protrusion is operable to bear; a pair of lever supports being disposed on the substrate for rotatably supporting the lever about the axis of rotation; and an area of contact between the protrusion and the bearing surface being positioned vertically between the axis of rotation and the plane of the substrate, wherein a voltage difference between the pair of electrical contacts causes horizontal movement of the thermal arch beam in the plane and the protrusion bears against the lever causing rotation of the lever out of the plane. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A projectile, comprising:
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a flow surface; and at least one MEMS apparatus comprising a substrate defining a plane;
a pair of electrical contacts being disposed on the substrate;
a thermal arch beam being supported by and connected between the contacts, the thermal arch beam includes a midpoint and a protrusion located at about the midpoint;
a lever including an axis of rotation and a bearing surface upon which the protrusion is operable to bear;
a pair of lever supports being disposed on the substrate for rotatably supporting the lever about the axis of rotation; and
an area of contact being situated between the protrusion and the bearing surface being positioned vertically between the axis of rotation and the plane of the substrate,wherein a voltage difference between the pair of electrical contacts causes horizontal movement of the thermal arch beam in the plane and the protrusion bears against the lever causing rotation of the lever out of the plane, and wherein said at least one MEMS apparatus is disposed at the flow surface where the lever is substantially flush with the flow surface in an off position of said at least one MEMS apparatus, and the lever extends out of a plane of the flow surface in an on position of said at least one MEMS apparatus. - View Dependent Claims (8, 9, 10, 11, 12, 13)
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Specification