Microelectromechanical device and method utilizing nanoparticles
First Claim
1. A method of making an optical microelectromechanical system (MEMS) device, comprising:
- forming a first electrode of the optical microelectromechanical system device;
providing a dielectric layer over the first electrode;
providing a sacrificial layer over the dielectric layer;
forming a second electrode over the sacrificial layer;
removing the sacrificial layer after forming the second electrode;
providing a plurality of pre-formed particles; and
depositing the plurality of pre-formed particles on the sacrificial layer after providing the plurality of pre-formed particles, after providing the sacrificial layer and before forming the second electrode, wherein the plurality of pre-formed particles have a diameter between about 10 Å and
about 500 Å
,wherein forming the second electrode comprises transferring a texture from the pre-formed particles on the sacrificial layer into a surface of the second electrode deposited over the sacrificial layer.
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Accused Products
Abstract
A microelectromechanical device (MEMS) utilizing nanoparticles for reducing stiction is disclosed. In one embodiment, a microelectromechanical device is an interferometric modulator that includes a transparent electrode assembly having a first surface; and a movable reflective electrode assembly with a second surface facing the first surface. The movable reflective electrode assembly is movable between a relaxed and actuated (collapsed) position. Particles are deposited over the transparent electrode assembly or over a sacrificial layer separating the two electrodes. The particles lead to dimples in the reflective surface of the moving electrode. The particles can be removed with the sacrificial layer or remain in final devices.
548 Citations
17 Claims
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1. A method of making an optical microelectromechanical system (MEMS) device, comprising:
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forming a first electrode of the optical microelectromechanical system device; providing a dielectric layer over the first electrode; providing a sacrificial layer over the dielectric layer; forming a second electrode over the sacrificial layer; removing the sacrificial layer after forming the second electrode; providing a plurality of pre-formed particles; and depositing the plurality of pre-formed particles on the sacrificial layer after providing the plurality of pre-formed particles, after providing the sacrificial layer and before forming the second electrode, wherein the plurality of pre-formed particles have a diameter between about 10 Å and
about 500 Å
,wherein forming the second electrode comprises transferring a texture from the pre-formed particles on the sacrificial layer into a surface of the second electrode deposited over the sacrificial layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A method of making an optical microelectromechanical system (MEMS) device, comprising:
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forming a first electrode of the optical microelectromechanical system device; providing a dielectric layer over the first electrode; providing a plurality of pre-formed particles; depositing the plurality of pre-formed particles on the dielectric layer after providing the plurality of pre-formed particles, wherein the plurality of pre-formed particles have a diameter between about 10 Å and
about 500 Å
;providing a sacrificial layer over the dielectric layer and the plurality of pre-formed particles such that a top surface of the sacrificial layer includes bumps at positions above the plurality of pre-formed particles; forming a second electrode over the sacrificial layer; and removing the sacrificial layer after forming the second electrode. - View Dependent Claims (10, 11)
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12. A method of making an optical microelectromechanical system (MEMS) device, comprising:
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forming a first at least partially transparent electrode; providing a dielectric layer over the first electrode; providing a sacrificial layer over the dielectric layer; forming a second reflective electrode over the sacrificial layer; providing a liquid containing a plurality of pre-formed nanoparticles; dispensing the liquid with the nanoparticles over the dielectric layer after providing the dielectric layer and before forming the second electrode; and removing the liquid from over the dielectric layer to leave the nanoparticles over the dielectric layer without forming a continuous layer from the liquid; wherein forming the second reflective electrode comprises transferring a texture formed by the nanoparticles left over the dielectric layer into a surface of the second reflective electrode formed over the sacrificial layer. - View Dependent Claims (13, 14, 15, 16, 17)
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Specification