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Fluid controller

  • US 7,726,333 B2
  • Filed: 04/23/2002
  • Issued: 06/01/2010
  • Est. Priority Date: 03/05/2001
  • Status: Active Grant
First Claim
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1. A fluid control apparatus comprising a plurality of lines arranged in parallel on a base member and having inlets, as well as outlets, facing toward the same direction, each of the lines comprising a plurality of fluid control devices arranged in an upper stage and a plurality of block coupling members arranged in a lower stage, the fluid control apparatus being characterized in that at least one of the lines is provided on each of opposite sides thereof with a tape heater, a tape heater holding clip being of an inverted U-shape with flat opposed walls and being removably attached to the tape heater, a space for positioning the tape heater holding clip therein being provided in each of locations between adjacent fluid control devices, the tape heaters being held from opposite sides thereof to block bodies of the fluid control devices with a resilient force acting to reduce the spacing between the opposed walls of the clip, the line provided with the heaters being mounted on a line support member removably attached to the base member;

  • the base member in the form of a frame comprising a plurality of lateral rails the main axis of which extends in a direction orthogonal to the lines.

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