System and method for modulation mapping

  • US 7,733,100 B2
  • Filed: 05/18/2006
  • Issued: 06/08/2010
  • Est. Priority Date: 08/26/2005
  • Status: Active Grant
First Claim
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1. A system for testing an integrated circuit microchip using laser probing, comprising:

  • a laser source providing a laser beam;

    a beam optics receiving said laser beam and focusing said laser beam onto a selected spot on said microchip;

    a photosensor receiving reflected laser light that is reflected from said microchip and providing an electrical signal;

    collection electronics receiving the electrical signal from said photosensor and providing an output signal;

    an analysis system receiving said output signal over a specified period of time and providing a total power signal corresponding to the total radiation power received over the specified period of time.

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