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Method for manufacturing vertical germanium detectors

  • US 7,736,934 B2
  • Filed: 10/20/2008
  • Issued: 06/15/2010
  • Est. Priority Date: 10/19/2007
  • Status: Expired due to Fees
First Claim
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1. A method for fabricating a vertical germanium detector, said method comprising:

  • opening a detector window through an oxide layer on a single crystalline substrate;

    growing a single crystal germanium layer within said detector window, and an amorphous germanium layer on said oxide layer;

    polishing and removing said amorphous germanium layer until a portion of said amorphous germanium layer is located around said single crystal germanium layer;

    depositing a dielectric layer on said amorphous germanium layer and said single crystal germanium layer;

    performing an implant on said single crystal germanium layer;

    opening an oxide window on said dielectric layer; and

    depositing a refractory metal layer on said single crystal germanium layer to form a germanide layer and a germanium detector.

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