Magnetic read head with reduced shunting

• US 7,746,602 B2
• Filed: 06/21/2006
• Issued: 06/29/2010
• Est. Priority Date: 06/21/2006
• Status: Active Grant

• Current Assignee: Western Digital Technologies Incorporated (Western Digital Corporation)
• Original Assignee: Hitachi Global Storage Technologies Netherlands BV (Western Digital Corporation)
• Inventors: Gill, Hardayal S.
• Primary Examiner(s): Renner; Craig A.
• Assistant Examiner(s): ASHFORD, TAMARA R
• Application Number:
  US11/425,665
• Publication Number:
  US 20070297090A1
• Time in Patent Office: 1,469 Days
• Field of Search: None
• US Class Current: 360/324.12
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: B82Y 25/00 Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
• CPC Class Codes: G11B 5/3163 Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
• CPC Class Codes: G11B 5/3906 Details related to the use of magnetic thin film layers or to their effects
• CPC Class Codes: G11B 5/3909 Arrangements using a magnetic tunnel junction
• CPC Class Codes: Y10T 29/49037 Using reference point/surface to facilitate measuring

Abstract

A magnetic read head and a method for manufacturing a magnetic read head are provided. In one embodiment, the method includes providing the magnetic read head comprising a pinning layer disposed over a substrate of the magnetic read head, a pinned layer, a reference layer, a tunneling barrier layer, and a free layer, wherein the free layer is in contact with the tunneling barrier layer. The method further includes milling partially through the free layer from a back surface, thereby creating an exposed face of the free layer which is parallel to the substrate and oxidizing a portion of the free layer between the exposed face and the tunneling barrier layer. The method further includes milling through the free layer, tunneling barrier layer, reference layer, pinned layer, and pinning layer along lateral sides of the magnetic read head.

Claims

1. A magnetic read head, comprising:

a substrate;

a pinning layer deposited over the substrate;

a pinned layer deposited over the pinning layer;

a reference layer deposited over the pinned layer;

a tunneling barrier layer deposited over the reference layer;

a free layer deposited over the tunneling barrier layer, wherein the free layer is in contact with the tunneling barrier layer;

a back surface opposite an air bearing surface of the magnetic read head, wherein the back surface has been milled from a top side of the magnetic read head opposite the substrate partially through the free layer, thereby creating an exposed face of the free layer which is parallel to the substrate,

wherein a first portion of the free layer between the exposed face and the tunneling barrier layer is oxidized,

wherein the free layer, tunneling barrier layer, reference layer, pinned layer, and pinning layer have been milled along lateral sides of the magnetic read head which are perpendicular with respect to the back surface, and

wherein at least a portion of the lateral sides of the magnetic read head comprise a face of a second portion of the free layer which is not oxidized.

2. The magnetic read head of claim 1, wherein the first portion of the free layer between the exposed face and the tunneling barrier layer is less than 60 angstroms (Å

) thick.

3. The magnetic read head of claim 1, wherein the first portion of the free layer between the exposed face and the tunneling barrier is less than 40 Å

thick.

4. The magnetic read head of claim 1, wherein the first portion of the free layer between the exposed face and the tunneling barrier is 15 to 20 Å

thick.

5. The magnetic read head of claim 1, further comprising:

a layer of alumina plated directly on the free layer, the barrier layer, the reference layer, the pinned layer, and the pinning layer along the lateral sides of the magnetic read head.

6. The magnetic read head of claim 1, wherein the magnetic read head further comprises a shield layer which is plated between the substrate and the pinning layer and wherein the lateral sides of the magnetic read head have been milled to a depth of 60 to 100 Å

into the shield layer.

7. The magnetic read head of claim 1, wherein the free layer comprises at least one of cobalt-iron (CoFe), cobalt-iron-boron (CoFeB), nickel-iron (NiFe), and cobalt-boron (CoB).

8. The magnetic read head of claim 1, wherein the tunneling barrier layer comprises magnesium-oxide (MgO).

9. A hard drive, comprising:

a magnetic disk;

an arm rotatably mounted to move over the magnetic disk; and

a magnetic read head connected to an end of the arm comprising;

a substrate;

a pinning layer deposited over the substrate;

a pinned layer deposited over the pinning layer;

a reference layer deposited over the pinned layer;

a tunneling barrier layer deposited over the reference layer;

a free layer deposited over the tunneling barrier layer, wherein the free layer is in contact with the tunneling barrier layer;

a back surface opposite an air bearing surface of the magnetic read head, wherein the air bearing surface of the magnetic read head faces the magnetic disk, wherein the back surface has been milled from a top side of the magnetic read head opposite the substrate partially through the free layer, thereby creating an exposed face of the free layer which is parallel to the substrate,

wherein a first portion of the free layer between the exposed face and the tunneling barrier layer which is oxidized,

wherein the free layer, tunneling barrier layer, reference layer, pinned layer, and pinning layer have been milled along lateral sides of the magnetic read head which are perpendicular with respect to the back surface, and

wherein at least a portion of the lateral sides of the magnetic read head comprise a face of a second portion of the free layer which is not oxidized.

10. The hard drive of claim 9, wherein the first portion of the free layer between the exposed face and the tunneling barrier is 15 to 20 Å

thick.

11. The hard drive of claim 9, further comprising:

a layer of alumina plated directly on the free layer, the barrier layer, the reference layer, the pinned layer, and the pinning layer along the lateral sides of the magnetic read head.

12. The hard drive of claim 9, wherein the free layer comprises at least one of cobalt-iron (CoFe), cobalt-iron-boron (CoFeB), nickel-iron (NiFe), and cobalt-boron (CoB).