Silicon MEMS resonators
First Claim
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1. A silicon micro-electromechanical system (MEMS) device comprising:
- a resonating element configured to simultaneously resonate in a first plane of motion to provide a frequency reference and to move in a second plane of motion;
an electrode having an effective area that varies as the resonating element moves in the second plane of motion; and
a cavity defining a distance between the electrode and a first side of the resonating element, wherein the distance varies as the resonating element resonates in the first plane.
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Abstract
The invention relates to MEMS resonators. In one embodiment, an integrated resonator and sensor device includes a micro-electromechanical system (MEMS) resonator, and an anchor portion coupled to the MEMS resonator and configured to allow resonance of the MEMS resonator in a first plane of motion and movement of the MEMS resonator in a second plane of motion. In other embodiments, additional apparatuses, devices, systems and methods are disclosed.
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15 Claims
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1. A silicon micro-electromechanical system (MEMS) device comprising:
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a resonating element configured to simultaneously resonate in a first plane of motion to provide a frequency reference and to move in a second plane of motion; an electrode having an effective area that varies as the resonating element moves in the second plane of motion; and a cavity defining a distance between the electrode and a first side of the resonating element, wherein the distance varies as the resonating element resonates in the first plane. - View Dependent Claims (2, 3, 4, 5)
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6. An integrated resonator and sensor device comprising:
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a micro-electromechanical system (MEMS) resonator; an anchor portion coupled to the MEMS resonator and configured to allow resonance of the MEMS resonator in a first plane of motion and movement of the MEMS resonator in a second plane of motion; and a first electrode spaced apart from the MEMS resonator in the first plane by a distance that varies with resonance of the MEMS resonator in the first plane of motion. - View Dependent Claims (7, 8, 9, 10, 11, 12, 13)
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14. A tire pressure monitoring system comprising:
an integrated resonator and sensor device comprising; a micro-electromechanical system (MEMS) resonator, and an anchor portion coupled to the MEMS resonator and configured to allow resonance of the MEMS resonator in a first plane of motion and movement of the MEMS resonator in a second plane of motion; and circuitry coupled to the integrated resonator and sensor device and configured to determine a frequency reference from the resonance of the MEMS resonator in the first plane of motion and an acceleration of the MEMS resonator from the movement of the MEMS resonator in the second plane of motion. - View Dependent Claims (15)
Specification