Method for coating a support with a material

• US 7,767,269 B2
• Filed: 11/28/2002
• Issued: 08/03/2010
• Est. Priority Date: 11/28/2001
• Status: Expired due to Fees

• Current Assignee: EPPRA Co.
• Original Assignee: EPPRA Co.
• Inventors: Choi, Peter
• Primary Examiner(s): Padgett; Marianne L
• Application Number:
  US10/497,052
• Publication Number:
  US 20050147767A1
• Time in Patent Office: 2,805 Days
• Field of Search: None
• US Class Current: 427/523
• CPC Class Codes: C23C 14/22 characterised by the process of coating
• CPC Class Codes: C23C 14/5833 Ion beam bombardment
• CPC Class Codes: C23C 14/5893 Mixing of deposited material
• CPC Class Codes: C23C 16/56 After-treatment

Abstract

The invention concerns a method for coating a support (10) comprising a first material with a coating layer comprising a second material, including at least a phase (A, A′) for deposition of a layer of given thickness of coherent material (11, 13) on the support surface during which the interaction between an ion source and a plasma is used. The invention is characterized in that each phase (A, A′) of material deposition is followed by a phase (B, B′) for exposure of the support and the deposited layer of material (11, 13) to a pulse of limited duration of an ionic bombardment with high energy density of selected energy density level.

Claims

1. A method for coating a support comprising a first material with a coating layer comprising a second material, the method comprising successively and independently:

in a material deposition step, depositing a coating layer comprising the second material having a given thickness on the support using an in situ source of plasma, and

in a bombardment step, exposing the support and the deposited coating layer to an ion bombardment pulse at a predetermined energy density level for a predetermined duration, wherein the predetermined duration of the pulse and the predetermined energy density level of bombarded ions during the bombardment step are chosen such that the bombarded ions have sufficient energy to penetrate the coating layer and beyond the coating layer only to a region immediately adjacent to the coating layer and to transfer their energy to the coating layer and to the immediately adjacent region to create;

an upper layer formed by cooling of an upper portion of the coating layer at a cooling speed of between about 10⁹ and 10¹⁰ degrees per second, said upper layer consisting of the second material and having an amorphous structure of finer granularity than the deposited coating layer before the bombardment step; and

an intermediate layer resulting from fusion of a lower portion of the coating layer and the immediately adjacent region, wherein the intermediate layer includes an alloy including the first material and the second material.

2. The method according to claim 1, wherein the method includes repetition the material deposition step and the bombardment step in order to increase a total thickness of a layer consisting of the second material.

3. The method according to claim 2, wherein the total thickness of the layer consisting of the second material is 20 microns.

4. The method according to claim 1, wherein the predetermined duration of the ion bombardment pulse is less than a microsecond.

5. The method according to claim 4, wherein the predetermined duration of the ion bombardment pulse is less than a hundred nanoseconds.

6. The method according to claim 1, wherein the energy of the bombarded ions is about or greater than 300 keV.

7. The method according to claim 1, wherein the plasma source used in the material deposition step is a plasmatron, or a plasma arc source.

8. The method according to claim 1, wherein the support material is a metal, a composite material or a plastic material.

9. The method according to claim 1, wherein the predetermined energy density level of the ions corresponds to an energy input on the support of the order of 0.01 to 5 Joules per square centimeter.