Depth measurement and depth control or automatic depth control for a hollow to be produced by a laser processing device

• US 7,767,928 B2
• Filed: 09/08/2004
• Issued: 08/03/2010
• Est. Priority Date: 09/05/2001
• Status: Active Grant

• Current Assignee: Lasertec GmbH
• Original Assignee: Lasertec GmbH
• Inventors: Hildebrand, Peter, Wrba, Peter, Reisacher, Martin, Kuhl, Michael
• Primary Examiner(s): Heinrich; Samuel M
• Application Number:
  US10/935,823
• Publication Number:
  US 20050029237A1
• Time in Patent Office: 2,155 Days
• Field of Search: 219/121.61, 219/121.62, 219/121.68, 219/121.69, 219/121.71
• US Class Current: 219/121.69
• CPC Class Codes: B23K 26/032 using optical means
• CPC Class Codes: B23K 26/361 for deburring or mechanical trimming B23K26/351 takes precedence

Abstract

According to a method for a depth measurement the depths of measuring points on a calibration surface are measured and correction values depending on differences between the measured values and known values are used and stored for a later correction. According to a method for the layer-wise production of a hollow the horizontal boundaries (x_g, y_g) for the removal of a layer (S_i+1) depending on the hollow depth (z) were determined from the shape definition of the hollow. The measured values can be continuously stored and used for a later control of the laser processing device.

Claims

1. A method for making a specifically formed hollow in a work piece by means of a laser machining apparatus which, in a layer-wise manner, removes material from the work piece in horizontal layers, wherein the horizontal boundaries of the hollow change in at least one layer, the method comprising:

continuously measuring a depth of the hollow being formed; and

determining the horizontal boundaries to be removed in the next subsequent layer based on the measured depth of the current layer of the hollow and a form definition of the hollow.

2. Method according to claim 1, characterized in that the thickness of a removed layer is determined from measured depths of the hollow, and the boundaries in horizontal direction for removal in a subsequent layer is determined also in accordance with a determined layer thickness from the form definition of the hollow.

3. Method according to claim 1, wherein boundaries of removal in a layer are determined with reference to stored form data of the hollow.

4. A method for forming a specifically formed hollow in a work piece by means of a laser machining apparatus which removes, in a layer-wise manner, material of the work piece in accordance with a defined shape, the method comprising:

continuously measuring the depth of the hollow;

continuously storing the measured depth together with respective coordinates or at memory locations corresponding to the respective coordinates; and

controlling the laser machining apparatus during removal of subsequent layers based on the stored depth.

5. Method according to claim 4, characterized in that a stored measured value is used when, within the same layer, the laser is near a site corresponding to the measured valued and/or when, in a subsequent layer, the laser is at or close by a site corresponding to the measured value.

6. Method according to claim 4, characterized in that a measurement value is used for adjusting instantaneous or future interaction parameters of a laser beam.

7. Method according to claim 6, characterized in that for a pulsed laser a laser amplitude and/or an impulse elevation and/or a duty ratio are adjusted.

8. Method according to claim 4, characterized in that the stored measured values are used for removing a partial layer.

9. Method according to claim 4, in which for measuring the depth with a depth sensor a light emanating from a working site is used, characterized in that the depth sensor is calibrated,

a depth is measured at a specific site of the hollow,

the measured value is corrected in accordance with the position of the site and with reference to correction values stored during calibration, and the corrected value is used as measured depth.

10. Method according to claim 9, characterized in that correction is made by adding a value or by multiplying a value.

11. Method according to claim 9, characterized in that a correction is made in accordance with the depth of the hollow.

12. Method according to one of the claim 9, wherein for calibrating the depth sensor the depth of measurement points on a calibrating surface with known shape are measured,

measured values are compared with known values at the respective measurement point of the calibrating surface, and

correction values are stored in accordance with a difference between the measured value and the known value together with the respective coordinates or at memory locations corresponding to the respective coordinates.

13. Method according to claim 12, characterized in that for depth measurement the sensor uses a light emanating from the working site, and that laser light is guided through a laser beam guidance across the surface of the work piece within a working area defined by the apparatus.

14. Method according to claim 12, characterized in that the calibrating surface is a plane.

15. Method according to claim 14, characterized in that the calibrating surface is measured a plurality of times, and the calibrating surface is shifted as compared to the measurement system in horizontal direction between various measurements, wherein for measurement points corresponding to each other within the working area or being close to each other correction values are formed in accordance with all measurements for said measurement point and are stored for said measurement point.

16. Method according to one of the claim 12, characterized in that the distance between measurement points in advancing direction of the laser beam is determined by the processing speed of a digital system and by the advancing speed of the laser beam.

17. Method according to claim 14, characterized in that the calibrating surface has an unevenness smaller than 5 micrometers, preferably smaller than one micrometer.