Angular velocity detecting device
First Claim
1. An angular rate detecting device in which an x-axis direction on a surface of an active layer, a y-axis direction perpendicular to the x-axis direction on the surface of the active layer, and a z-axis direction perpendicular to the surface of the active layer are given to a substrate having a basement layer and the active layer on the basement layer interposing an interlayer insulating layer formed in a thickness direction;
- and wherein a drive frame provided on the active layer so as to vibrate in the x-axis direction and a Coriolis frame provided so as to vibrate also in the y-axis direction following the vibration of the drive frame configure the angular rate detecting device for detecting a physical amount relating to a Coriolis force generated to the Coriolis frame when an angular rate about the z-axis direction is applied, the angular rate detecting device comprising;
at least two fixed beams provided to extend in opposite directions in the y-axis direction orthogonal to the vibrating direction and substrate by a fixed end between said fixed beams;
at least two free beams provided to extend in the x-axis direction and each coupled with a free end of at least a respective one of said fixed beams; and
at least two supporting beams extending in the y-axis direction with predetermined spaces from said fixed beams, wherein each of said supporting beams has one end coupled with a respective one of the free beams and another end coupled with the drive frame near the fixed end.
1 Assignment
0 Petitions
Accused Products
Abstract
A high-performance angular rate detecting device is provided. A driving part including a drive frame and a Coriolis frame is levitated by at least two fixing beams which share a fixed end and are extending in a direction orthogonal to a driving direction, thereby vibrating the driving part. Even when a substrate is deformed by mounting or heat fluctuation, internal stress generated to the fixed beam and a supporting beam is small, thereby maintaining a vibrating state such as resonance frequency and vibration amplitude constant. Therefore, a high-performance angular rate detecting device which is robust to changes in mounting environment can be obtained.
18 Citations
10 Claims
-
1. An angular rate detecting device in which an x-axis direction on a surface of an active layer, a y-axis direction perpendicular to the x-axis direction on the surface of the active layer, and a z-axis direction perpendicular to the surface of the active layer are given to a substrate having a basement layer and the active layer on the basement layer interposing an interlayer insulating layer formed in a thickness direction;
- and wherein a drive frame provided on the active layer so as to vibrate in the x-axis direction and a Coriolis frame provided so as to vibrate also in the y-axis direction following the vibration of the drive frame configure the angular rate detecting device for detecting a physical amount relating to a Coriolis force generated to the Coriolis frame when an angular rate about the z-axis direction is applied, the angular rate detecting device comprising;
at least two fixed beams provided to extend in opposite directions in the y-axis direction orthogonal to the vibrating direction and substrate by a fixed end between said fixed beams; at least two free beams provided to extend in the x-axis direction and each coupled with a free end of at least a respective one of said fixed beams; and at least two supporting beams extending in the y-axis direction with predetermined spaces from said fixed beams, wherein each of said supporting beams has one end coupled with a respective one of the free beams and another end coupled with the drive frame near the fixed end. - View Dependent Claims (2, 3, 4, 5)
- and wherein a drive frame provided on the active layer so as to vibrate in the x-axis direction and a Coriolis frame provided so as to vibrate also in the y-axis direction following the vibration of the drive frame configure the angular rate detecting device for detecting a physical amount relating to a Coriolis force generated to the Coriolis frame when an angular rate about the z-axis direction is applied, the angular rate detecting device comprising;
-
6. An angular rate detecting device comprising:
-
a basement layer; an interlayer provided on the basement layer; a fixed part provided on the interlayer; a drive frame provided on the same layer as the fixed part and suspended to from the fixed part via a first beam, a second beam, a third beam, and a connecting part; and a Coriolis frame provided on the same layer as the fixed part and suspended from the fixed part via a fourth beam, wherein, when a direction on a surface of the basement layer is taken as an x-axis direction and a direction perpendicular to the x-axis direction on the surface of the basement layer is taken as a y-axis direction, the first beam is provided to extend in the y-axis direction; the second beam is provided to extend in the x-axis direction; the third beam is provided to extend in the y-axis direction with a predetermined space from the first beam; one end of the first beam is coupled with the fixed part and another end of the first beam is coupled with the second beam; one end of the third beam is coupled with the second beam, and another end of the third beam is coupled with the connecting part; and the connecting part extends in the x-axis direction and the connecting part is coupled with the drive frame. - View Dependent Claims (7, 8, 9, 10)
-
Specification