Methods, systems, and computer program products for printing patterns on photosensitive surfaces

• US 7,777,861 B2
• Filed: 08/09/2007
• Issued: 08/17/2010
• Est. Priority Date: 09/30/2003
• Status: Active Grant

• Current Assignee: ASML Holding NV
• Original Assignee: ASML Holding NV
• Inventors: Van Der Mast, Karel, Latypov, Azat
• Primary Examiner(s): Glick; Edward J
• Assistant Examiner(s): Asfaw; Mesfin T
• Application Number:
  US11/836,343
• Publication Number:
  US 20080079923A1
• Time in Patent Office: 1,104 Days
• Field of Search: 355/53, 355/30
• US Class Current: 355/53
• CPC Class Codes: G03B 27/54 Lamp housings; Illuminating means
• CPC Class Codes: G03F 7/70291 Addressable masks, e.g. spatial light modulators [SLMs], digital micro-mirror devices [DMDs] or liquid crystal display [LCD] patterning devices
• CPC Class Codes: G03F 7/70475 Stitching, i.e. connecting image fields to produce a device field, the field occupied by a device such as a memory chip, processor chip, CCD, flat panel display

Abstract

A method, system, and computer program product are provided for printing a pattern on a photosensitive surface using a maskless lithography system including a spatial light modulator (SLM). The method, system, and computer program product define two or more exposure areas within a predetermined region of the surface, each area corresponding to selected pixels of the SLM. An overlap region is formed between the two or more exposure areas, the overlapping region being defined by respective overlapping edges of the exposure areas, the overlapping edges corresponding to overlapping pairs of the selected pixels from each area. The pixels within each pair are alternately activated such that only one of the pixels within the pair is used to produce the pattern.

Claims

1. A lithographic apparatus, comprising:

an illumination system configured to produce a beam of radiation;

an array of individually programmable elements configured to pattern the beam of radiation;

a projection system configured to project the patterned beam onto first and second overlapping target portions of a substrate, the first and second target portions corresponding to first and second elements of the array of individually programmable elements, and

a controller configured to control the array of individually controllable elements such that,

during a first exposure period;

the first element produces a pattern on the first target portion and the second element does not produce a pattern; and

during a second exposure period;

the second element produces a pattern on the second target portion and the first element within the pair does not produce a pattern.

2. The lithographic apparatus of claim 1, wherein the controller is configured to turn on the first element, while substantially simultaneously turning off the second element.

3. The lithographic apparatus of claim 1, wherein the controller is configured to control the array of individually programmable elements to alternatingly activate alternating pairs of the elements corresponding to different portions of the overlapping target portions, such that the alternating pairs of the elements form an alternating pattern stitching area.

4. The lithographic apparatus of claim 3, wherein the alternating pairs form a checkerboard pattern.

5. The lithographic apparatus of claim 1, wherein the pattern is a portion of an oscillating stitching line.

6. The lithographic apparatus of claim 1, wherein the controller is configured to redistribute the pattern within the overlapping region.

7. The lithographic apparatus of claim 6, wherein controller is configured to spatially average stitching disturbances during the redistributing of the pattern.

8. A computer-readable medium containing instructions for controlling at least one processor by a method comprising:

defining two or more exposure areas within a predetermined region of a photosensitive surface, each area corresponding to selected pixels of a spatial light modulator;

forming an overlapping region between the two or more exposure areas, the overlapping region being defined by respective overlapping edges of the exposure areas, each overlapping edge corresponding to at least one overlapping pair of the selected pixels from each area; and

alternatingly activating the pixels within the pair such that only one of the pixels within the pair produces a pattern during one exposure and only the other pixel within the pair produces the pattern during an ensuing exposure.

9. The method of claim 8, wherein the alternately activating step includes turning one pixel on and substantially simultaneously turning the other pixel off.

10. The method of claim 8, wherein opposite alternating pairs are distributed throughout the overlapping region such that the alternating pairs form an alternating pattern stitching area.

11. The method of claim 10, wherein the alternating pairs form a checkerboard pattern.

12. The method of claim 8, wherein the pattern is representative of an oscillating stitching line.

13. The method of claim 8, further comprising redistributing the pattern within the overlapping region.

14. The method of claim 13, wherein the redistributing step includes spatially averaging stitching disturbances.

15. A system, comprising:

a processor; and

a memory in communication with the processor, the memory for storing a plurality of processing instructions for directing the processor to;

define two or more exposure areas within a predetermined region of a photosensitive surface, each area corresponding to selected pixels of a spatial light modulator;

form an overlapping region between the two or more exposure areas, the overlapping region being defined by respective overlapping edges of the exposure areas, each overlapping edge corresponding to at least one overlapping pair of the selected pixels from each area; and

alternatingly activate the pixels within the pair such that only one of the pixels within the pair produces a pattern during one exposure and only the other pixel within the pair produces the pattern during an ensuing exposure.

16. The system of claim 15, wherein the memory further comprises instructions to:

turn one pixel on and substantially simultaneously turning the other pixel off.

17. The system of claim 15, wherein the memory further comprises instructions to:

distribute opposite alternating pairs throughout the overlapping region such that the alternating pairs form an alternating pattern stitching area.

18. The system of claim 17, wherein the alternating pairs form a checkerboard pattern.

19. The system of claim 15, wherein the pattern is representative of an oscillating stitching line.

20. The system of claim 15, wherein the memory further comprises instructions to:

redistribute the pattern within the overlapping region to spatially average stitching disturbances.