Pivoting micro-mirror MEMS device with a sandwiched structure and a closed cellular core
First Claim
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1. A micro-mirror device comprising:
- a substrate;
a mirrored platform including an upper uniform, smooth and uninterrupted layer free from holes;
a core layer having a closed cellular structure; and
a lower uniform, smooth and uninterrupted layer free from holes, wherein the upper and lower layers are attached on opposite sides of the core layer forming a sandwich structure, with the core layer between the upper and lower layers, thereby closing the closed cellular structure in all three dimensions;
a hinge structure enabling the mirrored platform to rotate about an axis of rotation above the substrate; and
an electrode supported by the substrate for rotating the mirrored platform about the axis of rotation.
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Abstract
A large micro-mirror, e.g. 3 mm by 4 mm, in accordance with the present invention has sufficient rigidity to ensure a low mirror curvature, e.g. a radius of curvature greater than 5 meters, and a low mass in order to ensure a high oscillation frequency, e.g. greater than 1000 Hz. A method of making the micro-mirror utilizes bulk micro-machining technology, which enables the manufacture of a honeycomb structure sandwiched between two solid and smooth silicon layers without any indentations or holes. The honeycomb sandwich structure provides the rigidity and low mass needed to obtain a micro-mirror with a low mirror curvature and high resonant frequency.
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12 Claims
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1. A micro-mirror device comprising:
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a substrate; a mirrored platform including an upper uniform, smooth and uninterrupted layer free from holes;
a core layer having a closed cellular structure; and
a lower uniform, smooth and uninterrupted layer free from holes, wherein the upper and lower layers are attached on opposite sides of the core layer forming a sandwich structure, with the core layer between the upper and lower layers, thereby closing the closed cellular structure in all three dimensions;a hinge structure enabling the mirrored platform to rotate about an axis of rotation above the substrate; and an electrode supported by the substrate for rotating the mirrored platform about the axis of rotation. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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Specification