Wafer container with cushion sheet
First Claim
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1. A wafer container with a wafer mounting sheet comprising:
- a plurality of stacked wafer mounting trays that form interior spaces between adjacent wafer mounting trays; and
an elastic wafer mounting cushion sheet in each interior space and adapted to retain a semiconductor wafer therein,wherein a surface of the wafer mounting cushion sheet includes self-sucking portions and non-sucking portions, said self-sucking portions selectively exert a vacuum on the semiconductor wafer, a fixing force by which the wafer mounting cushion sheet retains the semiconductor wafer is adjusted by varying an area density of the self-sucking portions, and the area density of the self-sucking portions varies by location across the wafer mounting cushion sheet.
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Abstract
A wafer container with wafer-mounting cushion sheets prevents breaking and damage of semiconductor wafers due to impacts or repetitive warping by maintaining the semiconductor wafer in a flat state and enables the semiconductor wafer to be removed safely and easily without damage. The surface of each wafer-mounting cushion sheet includes a self-sucking portion for exerting a removable vacuum on the semiconductor wafer and a non-sucking portion for enabling separation of the semiconductor wafer.
12 Citations
8 Claims
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1. A wafer container with a wafer mounting sheet comprising:
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a plurality of stacked wafer mounting trays that form interior spaces between adjacent wafer mounting trays; and an elastic wafer mounting cushion sheet in each interior space and adapted to retain a semiconductor wafer therein, wherein a surface of the wafer mounting cushion sheet includes self-sucking portions and non-sucking portions, said self-sucking portions selectively exert a vacuum on the semiconductor wafer, a fixing force by which the wafer mounting cushion sheet retains the semiconductor wafer is adjusted by varying an area density of the self-sucking portions, and the area density of the self-sucking portions varies by location across the wafer mounting cushion sheet. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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Specification