Method and apparatus to help promote contact of gas with vaporized material
First Claim
1. A method utilizing a vaporizer that includes a vaporizer ampoule wall defining an internal compartment;
- and a plurality of solid source material holders disposed at different levels within the internal compartment;
wherein at least one solid source material holder has a solid source material support surface and a thermally conductive holder sidewall extending above the solid source material support surface; and
wherein each holder sidewall is adapted to be in substantial thermal contact with the vaporizer ampoule wall at an ampoule operating temperature, and the ampoule wall is adapted to transfer heat to the thermally conductive holder sidewall, the method comprising;
introducing source material comprising a solid into at least one solid source material holder of the plurality of solid source material holders;
dissolving at least a portion of the source material in a solvent;
removing said solvent from said source material; and
stacking said plurality of solid source material holders in the vaporizer ampoule.
8 Assignments
0 Petitions
Accused Products
Abstract
Vaporizable material is supported within a vessel to promote contact of an introduced gas with the vaporizable material, and produce a product gas including vaporized material. A heating element supplies heat to a wall of the vessel to heat vaporizable material disposed therein. The vessel may comprise an amoule having a removable top. Multiple containers defining multiple material support surfaces may be stacked disposed within a vessel in thermal communication with the vessel. A tube may be disposed within the vessel and coupled to a gas inlet. Filters, flow meters, and level sensors may be further provided. Product gas resulting from contact of introduced gas with vaporized material may be delivered to atomic layer deposition (ALD) or similar process equipment. At least a portion of source material including a solid may be dissolved in a solvent, followed by removal of solvent to yield source material (e.g., a metal complex) disposed within the vaporizer.
107 Citations
17 Claims
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1. A method utilizing a vaporizer that includes a vaporizer ampoule wall defining an internal compartment;
- and a plurality of solid source material holders disposed at different levels within the internal compartment;
wherein at least one solid source material holder has a solid source material support surface and a thermally conductive holder sidewall extending above the solid source material support surface; and
wherein each holder sidewall is adapted to be in substantial thermal contact with the vaporizer ampoule wall at an ampoule operating temperature, and the ampoule wall is adapted to transfer heat to the thermally conductive holder sidewall, the method comprising;introducing source material comprising a solid into at least one solid source material holder of the plurality of solid source material holders; dissolving at least a portion of the source material in a solvent; removing said solvent from said source material; and stacking said plurality of solid source material holders in the vaporizer ampoule. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
- and a plurality of solid source material holders disposed at different levels within the internal compartment;
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11. A vaporizer comprising:
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a vaporizer ampoule wall defining an internal compartment; a plurality of solid source material holders disposed at different levels within the internal compartment; and a solid source material disposed within the internal compartment, the solid source material comprising a material processed by dissolution in a solvent followed by removal of the solvent; wherein at least one solid source material holder has a solid source material support surface and a thermally conductive holder sidewall extending above the solid source material support surface; and wherein each holder sidewall is adapted to be in substantial thermal contact with the vaporizer ampoule wall at an ampoule operating temperature, and the ampoule wall is adapted to transfer heat to the thermally conductive holder sidewall. - View Dependent Claims (12, 13, 14, 15, 16, 17)
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Specification