Plasma processing method and plasma processing apparatus

  • US 7,829,463 B2
  • Filed: 03/30/2007
  • Issued: 11/09/2010
  • Est. Priority Date: 03/30/2006
  • Status: Active Grant
First Claim
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1. A plasma processing method for performing a plasma process on substrates by using a plasma generated in a processing space,wherein a first and a second electrode are disposed in parallel to each other with an interval in a processing vessel that is grounded and capable of being vacuum evacuated, the substrate is supported on the second electrode to face the first electrode, the processing vessel is vacuum evacuated to a pressure level, a processing gas is supplied into the processing space formed between the first electrode, the second electrode and a sidewall of the processing vessel, and a first radio frequency power is supplied to the second electrode to generate the plasma in the processing space, andwherein the first electrode is connected to the processing vessel via an insulator or a space, and is electrically coupled to a ground potential via a capacitance varying unit whose electrostatic capacitance is variable, and the electrostatic capacitance of the capacitance varying unit is controlled based on a process condition of the plasma process performed on the substrate.

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