Method and device for modulating light with semiconductor substrate
First Claim
1. A light modulation device, comprising:
- a substrate comprising a semiconductor material;
first and second layers formed on the substrate, the first and second layers having a cavity therebetween, wherein the first layer is at least partially transparent and the second layer is opaque and is configured to move relative to the substrate; and
at least one additional set of first and second layers formed on the substrate, the additional set of first and second layers having an additional cavity therebetween, wherein the additional first layer is at least partially transparent and the additional second layer is opaque and is configured to move relative to the substrate, wherein the device is configured to display an image.
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Abstract
Light in the visible spectrum is modulated using an array of modulation elements, and control circuitry connected to the array for controlling each of the modulation elements independently, each of the modulation elements having a surface which is caused to exhibit a predetermined impedance characteristic to particular frequencies of light. The amplitude of light delivered by each of the modulation elements is controlled independently by pulse code modulation. Each modulation element has a deformable portion held under tensile stress, and the control circuitry controls the deformation of the deformable portion. Each deformable element has a deformation mechanism and an optical portion, the deformation mechanism and the optical portion independently imparting to the element respectively a controlled deformation characteristic and a controlled modulation characteristic. The deformable modulation element may be a non-metal. The elements are made by forming a sandwich of two layers and a sacrificial layer between them, the sacrificial layer having a thickness related to the final cavity dimension, and using water or an oxygen based plasma to remove the sacrificial layer.
96 Citations
20 Claims
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1. A light modulation device, comprising:
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a substrate comprising a semiconductor material; first and second layers formed on the substrate, the first and second layers having a cavity therebetween, wherein the first layer is at least partially transparent and the second layer is opaque and is configured to move relative to the substrate; and at least one additional set of first and second layers formed on the substrate, the additional set of first and second layers having an additional cavity therebetween, wherein the additional first layer is at least partially transparent and the additional second layer is opaque and is configured to move relative to the substrate, wherein the device is configured to display an image. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A light modulation device, comprising:
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first and second means for reflecting light, the first and second reflecting means having a cavity therebetween, wherein the first reflecting means is at least partially transparent and the second reflecting means is opaque and is configured to move relative to the first reflecting means; means for supporting the first and second reflecting means, the supporting means comprising a semiconductor material; and at least one additional set of first and second means for reflecting, wherein the additional set of first and second reflecting means are formed on the supporting means, and the additional set of first and second reflecting means have a cavity therebetween, and wherein the additional first reflecting means is at least partially transparent and the additional second reflecting means is opaque and is configured to move relative to the supporting means, and the device is configured to display an image. - View Dependent Claims (16, 17, 18, 19, 20)
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Specification