Graphical user interface for presenting multivariate fault contributions

• US 7,831,326 B2
• Filed: 11/15/2007
• Issued: 11/09/2010
• Est. Priority Date: 05/04/2007
• Status: Expired due to Fees

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Schwarm, Alexander T., Lin, Y. Sean
• Primary Examiner(s): DeCady; Albert
• Assistant Examiner(s): Lee; Douglas S
• Application Number:
  US11/985,603
• Publication Number:
  US 20080276137A1
• Time in Patent Office: 1,090 Days
• Field of Search: 700/80, 700108-111, 700/121, 702 84- 85, 702/179, 702181-185, 370/221, 709/214, 714/25, 714/27, 714/56, 714/57
• US Class Current: 700/108
• CPC Class Codes: G05B 2219/45031 Manufacturing semiconductor wafers
• CPC Class Codes: G05B 23/0267 Fault communication, e.g. human machine interface [HMI]
• CPC Class Codes: Y02P 90/80 Management or planning

Abstract

Recipe steps of a manufacturing process run that generated a fault are displayed in a current view of a user interface, the recipe steps being displayed in association with a first axis. At least one of measured parameters or calculated parameters of the manufacturing process run are displayed in the current view, where at least one of the measured parameters and the calculated parameters are displayed in association with a second axis. A plurality of intersections of the recipe steps with at least one of the measured parameters or the calculated parameters are displayed in the current view, each of the plurality of intersections including a representation of a fault contribution attributable to at least one of a distinct measured parameter or a distinct calculated parameter at a distinct recipe step.

Claims

1. A method comprising:

displaying in a current view of a user interface recipe steps of a manufacturing process run that generated a fault, the recipe steps being displayed along a first axis;

displaying in the current view along a second axis at least one of parameters measured by a plurality of sensors for the manufacturing process run;

displaying in the current view a plurality of intersections of the recipe steps with at least one of the measured parameters, each of the plurality of intersections including a cell that provides a visual indicator of a contribution to a particular fault attributable to at least one of a distinct measured parameter at a distinct recipe step; and

displaying in the current view a legend that associates the visual indicator with at least one of a distinct fault contribution, a fault contribution range, or a fault contribution rank.

2. The method of claim 1, further comprising:

if a first intersection of a first recipe step and at least one of a first measured parameter is selected, displaying a subsequent view of the user interface that shows detailed information about at least one of the first measured parameter or at the first recipe step.

3. The method of claim 1, further comprising:

displaying the sensors in association with the second axis in the current view.

4. A computer readable medium including instructions that, when executed by a computer, cause the computer to perform a method comprising:

displaying in a current view of a user interface recipe steps of a manufacturing process run that generated a fault, the recipe steps being displayed along a first axis;

displaying in the current view along a second axis at least one of parameters measured by a plurality of sensors for the manufacturing process run;

displaying in the current view a plurality of intersections of the recipe steps with at least one of the measured parameters, each of the plurality of intersections including a cell that provides a visual indicator of a contribution to a particular fault attributable to at least one of a distinct measured parameter at a distinct recipe step; and

displaying in the current view a legend that associates the visual indicator with at least one of a distinct fault contribution, a fault contribution range, or a fault contribution rank.

5. The computer readable medium of claim 4, the method further comprising:

if a first intersection of a first recipe step and at least one of a first measured parameter is selected, displaying a subsequent view of the user interface that shows detailed information about at least one of the first measured parameter at the first recipe step.

6. The computer readable medium of claim 4, further comprising:

displaying the sensors in association with the second axis in the current view.

7. A user interface for a fault diagnosis system comprising:

a current view to display recipe steps of a manufacturing process run that generated a fault along a first axis, to display along a second axis at least one of parameters measured by a plurality of sensors for the manufacturing process run, to display a plurality of intersections of the recipe steps with at least one of the measured parameters, each of the plurality of intersections including a cell that provides a visual indicator of a contribution to a particular fault attributable to at least one of a distinct measured parameter at a distinct recipe step, and to display in the current view a legend that associates the visual indicator with at least one of a distinct fault contribution, a fault contribution range, or a fault contribution rank.

8. The user interface of claim 7, further comprising:

a subsequent view that shows detailed information about at least one of the first measured parameter at the first recipe step, wherein the subsequent view is displayed if a first intersection of a first recipe step and at least one of a first measured parameter is selected.

9. The user interface of claim 7, wherein the current view to display a list of one or more probable causes of the fault.

10. A method comprising:

displaying in a first view of a user interface a normalized trend plot of manufacturing process runs, wherein each of a plurality of data points in the trend plot represents normalized multivariate statistical data for a manufacturing process run;

displaying in the first view a normalized threshold, wherein each of the plurality of data points that has a normalized value that exceeds the normalized threshold indicates a fault;

receiving selection of a distinct data point having a distinct normalized value that exceeds the normalized threshold;

displaying in a second view of the user interface recipe steps of a distinct manufacturing process run represented by the selected data point, the recipe steps being displayed along a first axis;

displaying in the second view along a second axis at least one of parameters measured by a plurality of sensors for the manufacturing process run;

displaying in the second view a plurality of intersections of the recipe steps with at least one of the measured parameters, each of the plurality of intersections including a cell that provides a visual indicator of a contribution to a particular fault attributable to at least one of a distinct measured parameter at a distinct recipe step; and

displaying in the second view a legend that associates the visual indicator with at least one of a distinct fault contribution, a fault contribution range, or a fault contribution rank.

11. The method of claim 10, further comprising:

displaying in the second view a list of one or more possible causes of the fault for the distinct manufacturing process run.

12. A user interface for a fault diagnosis system comprising:

a first view to display a normalized trend plot of manufacturing process runs, wherein each of a plurality of data points in the trend plot represents normalized multivariate statistical data for a manufacturing process run, and to display a normalized threshold, wherein each of the plurality of data points that has a normalized value that exceeds the normalized threshold indicates a fault; and

a second view to display, upon a user selection of a distinct data point having a distinct normalized value that exceeds the normalized threshold, recipe steps of a distinct manufacturing process run represented by the selected data point along a first axis, to display along a second axis at least one of parameters measured by a plurality of sensors for the manufacturing process run, to display a plurality of intersections of the recipe steps with at least one of the measured parameters, each of the plurality of intersections including a cell that provides a visual indicator of a contribution to a particular fault attributable to at least one of a distinct measured parameter at a distinct recipe step, and to display a legend that associates the visual indicator with at least one of a distinct fault contribution, a fault contribution range, or a fault contribution rank.

13. The user interface of claim 12, wherein the second view is configured to display a list of one or more possible causes of the fault for the distinct manufacturing process run.