Treatment device, treatment device consumable parts management method, treatment system, and treatment system consumable parts management method

• US 7,842,189 B2
• Filed: 01/19/2006
• Issued: 11/30/2010
• Est. Priority Date: 03/14/2005
• Status: Expired due to Fees

• Current Assignee: Tokyo Electron Limited
• Original Assignee: Tokyo Electron Limited
• Inventors: Midorikawa, Ryotaro
• Primary Examiner(s): Tran; Binh X
• Assistant Examiner(s): Lin; Patti
• Application Number:
  US11/908,608
• Publication Number:
  US 20090078196A1
• Time in Patent Office: 1,776 Days
• Field of Search: 216/59, 118/108, 118/712
• US Class Current: 216/59
• CPC Class Codes: H01J 37/32642 Focus rings
• CPC Class Codes: H01J 37/32935 Monitoring and controlling tubes by information coming from the object and/or discharge
• CPC Class Codes: H01L 21/3065 Plasma etching; Reactive-ion etching
• CPC Class Codes: H01L 21/30655 comprising alternated and repeated etching and passivation steps, e.g. Bosch process
• CPC Class Codes: H01L 21/67069 for drying etching
• CPC Class Codes: H01L 21/67253 Process monitoring, e.g. flow or thickness monitoring
• CPC Class Codes: H01L 21/67276 Production flow monitoring, e.g. for increasing throughput program-control systems per se G05B19/00, e.g. total factory control G05B19/418

Abstract

A processing apparatus includes counters each used to measure the length of RF discharge time over which power is applied to a consumable component in correspondence to a specific type of processing executed in a processing chamber, a storage to store wear coefficient information indicating wear coefficients each corresponding to one of the plurality of types of processing, and a control unit that obtains information indicating RF discharge time lengths measured by the counters in correspondence to the individual types of processing, obtains the wear coefficients corresponding to the individual types of processing indicated in the wear coefficient information stored in the storage, calculates a wear index value for the consumable component based upon the RF discharge time lengths and the wear coefficients corresponding to the individual types of processing, and executes consumable component management processing based upon the calculated wear index value.

Claims

1. A processing apparatus capable of executing a plurality of types of processing under different processing conditions inside a processing chamber in which consumable components are disposed, comprising:

a measuring means for measuring a utilization status of a consumable component in correspondence to each type of processing executed in said processing chamber;

a storage means for storing wear coefficient information indicating wear coefficients each indicating a wear extent change rate determined in advance for said consumable component in correspondence to a specific type of processing among the plurality of types of processing executed in said processing chamber; and

a control unit that obtains utilization statuses corresponding to the individual types of processing, having been measured by said measuring means, obtains said wear coefficients corresponding to the individual types of processing indicated in said wear coefficients information stored in said storage means, calculates a wear index value for said consumable component based upon said utilization statuses corresponding to the individual types of processing and the wear coefficient corresponding to the individual types of processing and executes management processing to manage said consumable component based upon said calculated wear index value.

2. A processing apparatus according to claim 1, wherein:

said utilization status of said consumable component is a utilization frequency indicating the number of times said consumable component has been utilized; and

said control unit calculates said wear index value for said consumable component as a sum of products each obtained by the utilization frequency corresponding to a given type of processing by the wear coefficient corresponding to the same type of processing.

3. A processing apparatus according to claim 1, wherein:

said measuring means is constituted with counters each disposed in correspondence to one of the individual types of processing.

4. A processing apparatus according to claim 1, wherein:

said management processing executed for said consumable component includes;

processing through which a decision is made as to whether or not said consumable component has been replaced and if said consumable component is determined to have been replaced, said utilization statuses having been measured for said consumable component by said measuring means are reset.

5. A processing apparatus according to claim 1, wherein:

said processing executed in said processing chamber includes processing executed on a processing target substrate.

6. A processing apparatus according to claim 1, wherein:

said management processing, which includes calculation of said wear index value of said consumable component is executed while said processing apparatus is engaged in operation.

7. A processing apparatus according to claim 1, wherein:

said utilization status of said consumable component is a utilization time indicating the length of time over which said consumable component has been utilized; and

said control unit calculates said wear index value for said consumable component as a sum of products each obtained by multiplying the utilization time corresponding to a given type of processing by the wear coefficient corresponding to the same type of processing.

8. A processing apparatus according to claim 7, wherein:

said utilization time for said consumable component is measured by said measuring means is a length of time over which high-frequency power is discharged to be applied to an electrode plate disposed inside said processing chamber.

9. A processing apparatus according to claim 1, wherein:

said management processing executed for said consumable component includes processing through which said wear index value calculated for said consumable component is compared with a predetermined acceptable limit value for consumable component replacement timing and indicating when said wear index value calculated for said consumable component becomes equal to or greater than said acceptable limit value.

10. A processing apparatus according to claim 9, wherein:

said processing for indicating said consumable component replacement timing includes;

processing through which information indicating said consumable component replacement timing and information on said consumable component for which the replacement timing is indicated are displayed at a display means; and

processing through which, if there are a plurality of consumable components, with consumable component wear index values thereof having been calculated equal to or greater than said acceptable limit value, a decision is made based upon consumable component combination information set in advance as to whether or not there is a combination of at least two consumable components that can be replaced at once among the plurality of consumable components and if such a combination of consumable components is determined to exist, information indicating said consumable component combination is displayed at said display means.

11. A consumable component management method adopted in a processing apparatus capable of executing a plurality of types of processing under different processing conditions inside a processing chamber in which consumable components are disposed, comprising:

a step in which a measuring means is engaged to measure a utilization status of a consumable component in correspondence to each type of processing executed in said processing chamber; and

a step in which utilization statuses corresponding to the individual types of processing, having been measured by said measuring means, are obtained, wear coefficients each indicating a wear extent change rate determined in advance for said consumable component in correspondence to a specific type of processing among the plurality of types of processing indicated in wear coefficient information for said consumable component stored in a storage means, are obtained, a wear index value is calculated for said consumable component based upon said utilization statuses corresponding to the individual types of processing and said wear coefficients corresponding to the individual types of processing and said consumable component is managed based upon said calculated wear index value.

12. A consumable component management method adopted in a processing apparatus according to claim 11, wherein:

said utilization status of said consumable component is a utilization frequency indicating the number of times said consumable component has been utilized; and

in said step for calculating said wear index value for said consumable component, said wear index value is calculated for said consumable component as a sum of products each obtained by multiplying the utilization frequency corresponding to a given type of processing by the wear coefficient corresponding to the same type of processing.

13. A consumable component management method adopted in a processing apparatus according to claim 11, wherein:

said measuring means is constituted with counters each disposed in correspondence to one of the individual types of processing.

14. A consumable component management method adopted in a processing apparatus according to claim 11, wherein:

said step executed to manage said consumable component includes;

a step in which a decision is made as to whether or not said consumable component has been replaced; and

a step in which said utilization statuses for said consumable component having been measured by said measuring means are reset if said consumable component is judged to have been replaced.

15. A consumable component management method adopted in a processing apparatus according to claim 11, wherein:

said processing executed in said processing chamber includes processing executed on a processing target substrate.

16. A consumable component management method adopted in a processing apparatus according to claim 11, wherein:

said step, which includes calculation of said wear index value of said consumable component is executed for said consumable component while said processing apparatus is engaged in operation.

17. A consumable component management method adopted in a processing apparatus according to claim 11, wherein:

said utilization status of said consumable component is a utilization time indicating the length of time over which said consumable component has been utilized; and

in said step for calculating said wear index value for consumable component, said wear index value is calculated for said consumable component as a sum of products each obtained by multiplying the utilization time corresponding to a given type of processing by the wear coefficient corresponding to the same type of processing.

18. A consumable component management method adopted in a processing apparatus according to claim 17, wherein:

said utilization time measured for said consumable component by said measuring means is a length of time over which high-frequency power is discharged to be applied to an electrode plate disposed inside said processing chamber.

19. A consumable component management method adopted in a processing apparatus according to claim 11, wherein:

said step executed to manage said consumable component includes a step in which said wear index value calculated for said consumable component is compared with a predetermined acceptable limit value and replacement timing for said consumable component is indicated once said wear index value calculated for said consumable component becomes equal to or greater than said acceptable limit value.

20. A consumable component management method adopted in a processing apparatus according to claim 19, wherein:

said step executed to indicate replacement timing for said consumable component includes;

a step in which information indicating said consumable component replacement timing and information on said consumable component for which the replacement timing is indicated are displayed at a display means; and

a step in which, if there are a plurality of consumable components, with consumable component wear index values thereof having been calculated equal to or greater than said acceptable limit value, a decision is made based upon consumable component combination information set in advance as to whether or not there is a combination of at least two consumable components that can be replaced at once among the plurality of consumable components and if such a combination of consumable components is determined to exist, information indicating said consumable component combination is displayed at said display means.

21. A processing system that includes at least one processing apparatus capable of exchanging information with an external apparatus, wherein:

said processing apparatus is capable of executing a plurality of types of processing under different processing conditions within a processing chamber having consumable components disposed therein; and

comprises;

a measuring means for measuring a utilization status of a consumable component in correspondence to each type of processing executed in said processing chamber; and

a control unit that obtains utilization statuses corresponding to the individual types of processing, having been measured by said measuring means, obtains wear coefficients each indicating a wear extent change rate determined in advance for the consumable component in correspondence to a specific type of processing among the plurality of types of processing from said external apparatus, calculates a wear index value for said consumable component based upon said utilization statuses corresponding to the individual types of processing and said wear coefficients corresponding to the individual types of processing and executes management processing to manage said consumable component based upon said calculated wear index value.

22. A processing system according to claim 21, wherein:

said utilization status of said consumable component is a utilization time indicating the length of time over which said consumable component has been utilized; and

said control unit calculates said wear index value for said consumable component as a sum of products each obtained by multiplying the utilization time corresponding to a given type of processing by the wear coefficient corresponding to the same type of processing.

23. A processing system according to claim 21, wherein:

said utilization status of said consumable component is a utilization frequency indicating the number of times said consumable component has been utilized; and

said control unit calculates said wear index value for said consumable component as a sum of products each obtained by the utilization frequency corresponding to a given type of processing by the wear coefficient corresponding to the same type of processing.

24. A processing system according to claim 21, wherein:

said management processing executed for said consumable component includes processing through which said wear index value calculated for said consumable component is compared with a predetermined acceptable limit value for consumable component replacement timing and indicating when said wear index value calculated for said consumable component becomes equal to or greater than said acceptable limit value.

25. A processing system according to claim 24, wherein:

said processing for indicating replacement timing for said consumable component includes;

processing through which information indicating said consumable component replacement timing and information on said consumable component for which the replacement timing is indicated are displayed at a display means; and

processing through which information on a candidate consumable component, selected based upon a preset selection criterion to be used as a consumable component replacement, is obtained from said external apparatus and the candidate consumable component information thus obtained is brought up on display at said display means.

26. A processing system according to claim 24, wherein:

said processing for indicating said consumable component replacement timing includes;

processing through which replacement procedure information indicating a procedure for consumable component replacement is obtained from said external apparatus and the replacement procedure information thus obtained is brought up on display at a display means.

27. A consumable component management method adopted in a processing system that includes at least one processing apparatus capable of exchanging information with an external apparatus and executing a plurality of types of processing under different processing conditions inside a processing chamber having consumable components disposed therein, comprising:

a step in which a measuring means is engaged to measure a utilization status of a consumable component in correspondence to each type of processing executed in said processing chamber; and

a step in which utilization statuses corresponding to the individual types of processing, having been measured by said measuring means, are obtained, wear coefficients each indicating a wear extent change rate determined in advance for said consumable component in correspondence to a specific type of processing among the plurality of types of processing, indicated in wear coefficient information for said consumable component stored in a storage means, are obtained, a wear index value is calculated for said consumable component based upon said utilization statuses corresponding to the individual types of processing and said wear coefficients corresponding to the individual types of processing and said consumable component is managed based upon said calculated wear index value.

28. A consumable component management method adopted in a processing system according to claim 27, wherein:

said utilization status of said consumable component is a utilization time indicating the length of time over which said consumable component has been utilized; and

in said step for calculating said wear index value for consumable component, said wear index value is calculated for said consumable component as a sum of products each obtained by multiplying the utilization time corresponding to a given type of processing by the wear coefficient corresponding to the same type of processing.

29. A consumable component management method adopted in a processing system according to claim 27, wherein:

said utilization status of said consumable component is a utilization frequency indicating the number of times said consumable component has been utilized; and

in said step for calculating said wear index value for said consumable component, said wear index value is calculated for said consumable component as a sum of products each obtained by multiplying the utilization frequency corresponding to a given type of processing by the wear coefficient corresponding to the same type of processing.

30. A consumable component management method adopted in a processing system according to claim 27, wherein:

said step executed to manage said consumable component includes a step in which said wear index value calculated for said consumable component is compared with a predetermined acceptable limit value and replacement timing for said consumable component is indicated once said wear index value calculated for said consumable component becomes equal to or greater than said acceptable limit value.

31. A consumable component management method adopted in a processing system according to claim 30, wherein:

said processing for indicating replacement timing for said consumable component includes;

processing through which information indicating said consumable component replacement timing and information on said consumable component for which the replacement timing is indicated are displayed at a display means; and

processing through which information on a candidate consumable component, selected based upon a preset selection criterion to be used as a consumable component replacement, is obtained from said external apparatus and the candidate consumable component information thus obtained is brought up on display at said display means.

32. A consumable component management method adopted in said processing system according to claim 30, wherein:

said processing for indicating said consumable component replacement timing includes;

processing through which replacement procedure information indicating a procedure for consumable component replacement is obtained from said external apparatus and the replacement procedure information thus obtained is brought up on display at a display means.