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Compact tilt and vibration sensor and method for manufacturing the same

  • US 7,845,234 B2
  • Filed: 08/17/2006
  • Issued: 12/07/2010
  • Est. Priority Date: 08/17/2005
  • Status: Expired due to Fees
First Claim
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1. A compact tilt and vibration sensor comprising:

  • a case comprised of a case body having a hollow portion that is open at the top thereof and a lid that hermetically seals the opening of said hollow portion, a plurality of three-dimensional electrodes formed of at least four electrically conductive coatings that are arranged in equally spaced relationship with each other on inner peripheral wall surfaces of said hollow portion and a conductive metal sphere that is freely movably received in said hollow portion and comes into contact with two adjoining electrodes of said electrodes to electrically interconnect both of the two adjoining electrodes, said case body being formed of a laminated structure constituted by vertically laminating a plurality of sheets that are individually made from ceramics containing a predetermined amount of low thermal expansion glass, and are co fired at a low temperature, wherein when said case is tilted or vibrated, said conductive metal sphere is caused to move in said hollow portion so that the sensor is turned on/off by the moving displacement thereof, wherein;

    the conductive metal sphere comprises a spherical body without plating that is formed from hard gold alloy;

    the lid is formed of a low thermal expansion glass having a high gas-barrier property and a high heat resistance so that a motion of the conductive metal sphere in the hollow portion of said case body may be checked from the outside of said case through the glass lid with eyes;

    planar conductive coatings are formed on a bottom surface of the hollow portion of the case body and a lower surface of the lid as means for preventing and/or removing a static electricity charge of the conductive metal sphere;

    any impurities, such as moisture and fine dust, which adversely affect the on/off operation by the moving displacement of the conductive sphere, are removed from the hollow portion; and

    a gas having a high electrical insulation property is included in said hollow portion under the state in which it is depressurized at least to a predetermined degree of vacuum.

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