Lithographic apparatus and device manufacturing method

• US 7,859,647 B2
• Filed: 01/28/2008
• Issued: 12/28/2010
• Est. Priority Date: 12/27/2004
• Status: Expired due to Fees

• Current Assignee: ASML Holding NV, ASML Netherlands BV (ASML Holding NV)
• Original Assignee: ASML Holding NV
• Inventors: Baselmans, Johannes Jacobus Matheus, Dierichs, Marce Mathijs Theodore Marie, Bleeker, Arno Jan, Troost, Kars Zeger, Wagner, Christian, Ryzhikov, Lev, Smirnov, Stanislav
• Primary Examiner(s): NGUYEN, HUNG
• Application Number:
  US12/020,947
• Publication Number:
  US 20080137053A1
• Time in Patent Office: 1,065 Days
• Field of Search: 355/52, 355/53, 355/55, 355 67- 71, 356399-401, 250/548
• US Class Current: 355/67
• CPC Class Codes: G03F 7/702 Reflective illumination, i.e. reflective optical elements other than folding mirrors, e.g. extreme ultraviolet [EUV] illumination systems
• CPC Class Codes: G03F 7/70291 Addressable masks, e.g. spatial light modulators [SLMs], digital micro-mirror devices [DMDs] or liquid crystal display [LCD] patterning devices

Abstract

A system and method are used to direct a radiation beam to illuminate non-perpendicularly a patterning array of individually controllable elements used for patterning the radiation beam. The individually controllable elements can change a telecentricity of the radiation beam. Projection of the radiation beam onto the individually controllable elements can be by a concave mirror or use a folding mirror placed in an object field of the individually controllable elements. Alternatively, the individually controllable elements can change the optical axis of the radiation beam.

Claims

1. A lithographic apparatus, comprising:

an illumination system configured to condition a radiation beam;

an array of individually controllable elements configured to pattern the radiation beam;

a plurality of minors disposed between the illumination system and the array of individually controllable elements, wherein respective ones of the plurality of mirrors are configured to project the radiation beam onto corresponding elements in the array of individually controllable elements; and

a projection system configured to project the patterned radiation beam onto a target portion of a substrate,

wherein the radiation beam is arranged to illuminate the array of individually controllable elements non-perpendicularly and non-telecentrically, and wherein the array of individually controllable elements changes an optical axis and the telecentricity of the radiation beam.

2. The apparatus of claim 1, wherein a reflective surface of the corresponding element of the array of individually controllable elements is arranged at angle with respect to a longitudinal central axis of the projection system.

3. The apparatus of claim 2, wherein the angle is approximately 0.1 radians.

4. The apparatus of claim 1, wherein a reflective surface of each element of the array of individually controllable elements is arranged at an angle with respect to a longitudinal central axis of the projection system.

5. The apparatus of claim 1, wherein each of the plurality of mirrors is positioned such that a space exists between each mirror and an adjacent mirror.

6. The apparatus of claim 5, wherein the corresponding element is arranged to project the patterned radiation beam through the space adjacent to a respective mirror in the array of mirrors.

7. A device manufacturing method, comprising:

using a respective one of a plurality of mirrors to project a radiation beam onto a corresponding element of an array of individually controllable elements;

patterning the radiation beam using the array of individually controllable elements;

changing an optical axis and a telecentricity of the radiation beam using the corresponding element of the array; and

projecting the patterned beam of radiation onto a substrate using a projection system.

8. The method of claim 7, further comprising arranging the plurality of mirrors such that a space exists between each mirror and an adjacent mirror.

9. The method of claim 8, arranging the corresponding element to project the patterned radiation beam through the space adjacent to a respective mirror in the array of mirrors.

10. The method of claim 7, further comprising arranging a reflective surface of the corresponding element of the array of individually controllable elements at an angle with respect to a central axis of the projection system.