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IC card and booking-account system using the IC card

  • US 7,863,116 B2
  • Filed: 01/06/2010
  • Issued: 01/04/2011
  • Est. Priority Date: 12/27/2002
  • Status: Expired due to Fees
First Claim
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1. A method of forming a semiconductor device comprising:

  • forming a metal film over a substrate;

    forming a metal oxide film over the metal film by oxidizing a surface of the metal film by generating plasma;

    forming an oxide film over the metal oxide film;

    forming a base film over the oxide film;

    forming at least one thin film transistor over the base film; and

    peeling off the at least one thin film transistor and the base film from the substrate inside the metal oxide film or at an interface of the metal oxide film by physical means.

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