Method and apparatus for pressure measurement using quartz crystal
First Claim
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1. A pressure sensor, comprising:
- a pressure sensor configured to sense a pressure of a process fluid and provide a pressure sensor output;
a tube configured to couple the pressure of the process fluid to the pressure sensor;
a quartz crystal mounted to the tube wherein the quartz crystal has a resonate frequency which is related to the pressure received by the tube; and
circuitry configured to measure the resonate frequency of the quartz crystal and responsively provide an output indicative of the pressure of the process fluid as a function of the resonate frequency of the quartz crystal the circuitry further configured to provide an output based upon the pressure sensor output.
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Abstract
A pressure sensor includes a sensor which is arranged to couple to a process pressure. A quartz crystal is coupled to the sensor and is configured to measure pressure of fluid in the sensor body. An output from the quartz crystal is related to pressure applied to the sensor body by the process pressure.
130 Citations
29 Claims
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1. A pressure sensor, comprising:
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a pressure sensor configured to sense a pressure of a process fluid and provide a pressure sensor output; a tube configured to couple the pressure of the process fluid to the pressure sensor; a quartz crystal mounted to the tube wherein the quartz crystal has a resonate frequency which is related to the pressure received by the tube; and circuitry configured to measure the resonate frequency of the quartz crystal and responsively provide an output indicative of the pressure of the process fluid as a function of the resonate frequency of the quartz crystal the circuitry further configured to provide an output based upon the pressure sensor output. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A method of measuring a pressure of a process fluid comprising, receiving the pressure of the process fluid in a tube;
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measure pressure of the process fluid using a pressure sensor coupled to the tube; causing a quartz crystal mounted to the tube to resonate at a frequency; and measuring a resonant frequency change of the quartz crystal and providing an output related to the pressure of the process fluid based upon the resonant frequency change. - View Dependent Claims (18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29)
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Specification