Temperature compensating pressure sensor
First Claim
1. A temperature compensating pressure sensor arrangement comprising:
- a capacitive pressure sensor comprisinga substrate carrying CMOS layers;
a conductive membrane arranged on the substrate and defining a reference chamber such that capacitance changes resulting from displacement of the conductive membrane are converted to pressure change values; and
a cap which covers the conductive membrane, the cap having openings to permit pressure changes to be detected by the conductive membrane; and
a capacitive temperature sensor operatively arranged with respect to the capacitive pressure sensor, the temperature sensor comprisinga conductive membrane arranged on the substrate and defining a reference chamber such that capacitance changes resulting from displacement of the conductive membrane are converted to temperature change values, the conductive member defining openings; and
a cap which covers and seals the conductive membrane from an external environment.
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Accused Products
Abstract
A temperature compensating pressure sensor arrangement includes a capacitive pressure sensor having a substrate carrying CMOS layers. A conductive membrane is arranged on the substrate and defines a reference chamber such that capacitance changes resulting from displacement of the conductive membrane can be converted to pressure change values. A cap covers the conductive membrane and has openings to permit pressure changes to be detected by the conductive membrane. A capacitive temperature sensor is operatively arranged with respect to the capacitive pressure sensor and has a conductive membrane arranged on the substrate and defines a reference chamber such that capacitance changes resulting from displacement of the conductive membrane can be converted to temperature change values. The conductive member defining openings and cap covers and seals the conductive membrane from an external environment.
41 Citations
7 Claims
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1. A temperature compensating pressure sensor arrangement comprising:
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a capacitive pressure sensor comprising a substrate carrying CMOS layers; a conductive membrane arranged on the substrate and defining a reference chamber such that capacitance changes resulting from displacement of the conductive membrane are converted to pressure change values; and a cap which covers the conductive membrane, the cap having openings to permit pressure changes to be detected by the conductive membrane; and a capacitive temperature sensor operatively arranged with respect to the capacitive pressure sensor, the temperature sensor comprising a conductive membrane arranged on the substrate and defining a reference chamber such that capacitance changes resulting from displacement of the conductive membrane are converted to temperature change values, the conductive member defining openings; and a cap which covers and seals the conductive membrane from an external environment. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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Specification