Thermal anemometer flow sensor apparatus with a seal with conductive interconnect
First Claim
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1. A flow sensor apparatus, said apparatus comprising:
- a flow sense element including a flow sensing bridge, wherein said flow sense element and said flow sensing bridge are mounted on a housing and together sense a mass flow of a flow path; and
a seal with a conductive interconnect, wherein said seal is positioned adjacent said flow sensing bridge such that said seal with said conductive interconnect physically isolates said flow sensing bridge physically from an external environment;
a signal conditioning circuit that converts a sensed flow into a proportional analog output signal, wherein said signal conditioning circuit is electrically connected to said flow sensing bridge; and
wherein said seal with said conductive interconnect conducts a power signal along at least part of a path from said signal conditioning circuit to said flow sensing bridge, and conducts an output signal along at least part of a path from said flow sensing bridge to said signal conditioning circuit.
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Abstract
A flow sensor apparatus and method. A seal with a conductive interconnect is provided that includes a mass flow sense element mounted to a housing containing a thick film and/or thin film bridge structure for sensing media (e.g., mass flow) within a flow tube. The seal effectively isolates wirebond pads and electrical connections from the sensed media. The media, whether liquid or gas, can contain ionics that eventually contaminate the top of the mass flow sense element. The use of the seal with the conductive interconnect thus seals off the electrical connections and prevents exposure to the sensed media.
38 Citations
19 Claims
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1. A flow sensor apparatus, said apparatus comprising:
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a flow sense element including a flow sensing bridge, wherein said flow sense element and said flow sensing bridge are mounted on a housing and together sense a mass flow of a flow path; and a seal with a conductive interconnect, wherein said seal is positioned adjacent said flow sensing bridge such that said seal with said conductive interconnect physically isolates said flow sensing bridge physically from an external environment; a signal conditioning circuit that converts a sensed flow into a proportional analog output signal, wherein said signal conditioning circuit is electrically connected to said flow sensing bridge; and wherein said seal with said conductive interconnect conducts a power signal along at least part of a path from said signal conditioning circuit to said flow sensing bridge, and conducts an output signal along at least part of a path from said flow sensing bridge to said signal conditioning circuit. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 17, 18, 19)
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9. A flow sensor apparatus, said apparatus comprising:
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a flow sense element including a flow sensing bridge, wherein said flow sense element and said flow sensing bridge are mounted on a housing and sense a mass flow of a flow path; a cover comprising an inlet port and an outlet port with the flow path extending between the inlet port and the outlet port, said cover is mounted over said flow sense element and on said housing; and a seal with a conductive interconnect positioned adjacent said flow sensing bridge, wherein said seal with said conductive interconnect physically isolates said flow sensing bridge from an external environment, and said seal with said conductive interconnect is configured to transmit a power signal to said flow sensing bridge and to further transmit an output signal from said flow sensing bridge. - View Dependent Claims (10, 11)
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12. A method of configuring a flow sensor apparatus, said method comprising:
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providing a flow sense element having a flow sensing bridge; mounting said flow sense element and said flow sensing bridge on a housing, wherein said flow sense element and said flow sensing bridge are configured to sense a mass flow within a flow path; and positioning a seal with a conductive interconnect adjacent said flow sensing bridge, wherein said seal with said conductive interconnect isolates said flow sensing bridge from an external environment; providing a signal conditioning circuit that is configured to convert a sensed flow into a proportional analog output signal; electrically connecting said flow sensing bridge circuit to said signal conditioning circuit; and configuring said seal with said conductive interconnect to conduct a power signal along at least part of a path from said signal conditioning circuit to said flow sensing bridge, and conduct an output signal along at least part of a path from said flow sensing bridge to said signal conditioning circuit. - View Dependent Claims (13, 14, 15, 16)
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Specification