Micro-electro-mechanical module

• US 7,907,037 B2
• Filed: 02/05/2007
• Issued: 03/15/2011
• Est. Priority Date: 02/04/2006
• Status: Active Grant

• Current Assignee: Bellutech LLC
• Original Assignee: Evigia Systems, Inc.
• Inventors: Yazdi, Navid
• Primary Examiner(s): Enad; Elvin G
• Assistant Examiner(s): Rojas; Bernard
• Application Number:
  US11/671,130
• Publication Number:
  US 20070273463A1
• Time in Patent Office: 1,499 Days
• Field of Search: 335/78, 200/181
• US Class Current: 335/78
• CPC Class Codes: G01D 21/00 Measuring or testing not otherwise provided for
• CPC Class Codes: G01K 5/62 the solid body being formed of compounded strips or plates, e.g. bimetallic strip
• CPC Class Codes: G01P 15/0888 for indicating angular acceleration
• CPC Class Codes: G01P 15/135 by making use of contacts which are actuated by a movable inertial mass
• CPC Class Codes: G01P 15/18 in two or more dimensions
• CPC Class Codes: H01H 1/0036 Switches making use of microelectromechanical systems [MEMS] for electromagnetic relays H01H50/005; for electrostatic relays H01H59/0009
• CPC Class Codes: H01H 2001/0063 having electrostatic latches, i.e. the activated position is kept by electrostatic forces other than the activation force
• CPC Class Codes: H01H 2037/008 Micromechanical switches operated thermally
• CPC Class Codes: H01H 2300/032 using RFID technology in switching devices
• CPC Class Codes: H01H 35/14 Switches operated by change of acceleration, e.g. by shock or vibration, inertia switch wherein the liquid constitutes a contact of the switch H01H29/002
• CPC Class Codes: H01H 35/24 Switches operated by change of fluid pressure, by fluid pressure waves, or by change of fluid flow wherein the change of pressure is caused by change of temperature H01H37/36
• CPC Class Codes: H01H 35/42 Switches operated by change of humidity
• CPC Class Codes: H01H 69/01 for calibrating or setting of devices to function under predetermined conditions
• CPC Class Codes: Y02B 90/20 Smart grids as enabling technology in buildings sector smart grids supporting the management or operation of end-user stationary applications in general, or like technologies with no associated climate change mitigation effect Y04S20/00
• CPC Class Codes: Y04S 20/14 Protecting elements, switches, relays or circuit breakers

Abstract

A MEMS module that contains at least one integrated energy storage device whose discharge is minimized and controlled, so that power is available for system operation over longer periods of time. The MEMS module includes a device electrically coupled to the energy storage device for controlling charge transfers from the energy storage device while preventing charge leakage from the energy storage device. The controlling device includes a plurality of integrated MEMS switches that define open electrical paths that prevent charge leakage from the energy storage device through the MEMS switches, and are then operable to define closed electrical paths to allow charge transfers from the energy storage device, and preferably also allow charge transfers to the energy storage device, through the MEMS switches. The charge transfer can be utilized to power electronic circuits or store data in non-volatile digital memory.

Claims

1. A micro-electro-mechanical system module comprising:

at least one integrated energy storage device having a charge thereon;

at least one electronic circuit powered by the charge on the energy storage device; and

means electrically coupled to the energy storage device for controlling charge transfers from the energy storage device to the electronic circuit while preventing charge leakage from the energy storage device to the electronic circuit to enable the energy storage device to store energy over an extended period of time, the controlling means comprising a plurality of integrated MEMS switches between and electrically coupling the energy storage device to the electronic circuit so as to define electrical paths that are individually opened and closed by a corresponding individual MEMS switch of the MEMS switches, each individual MEMS switch being adapted to individually define an open electrical path that prevents charge leakage therethrough from the energy storage device to the electronic circuit, each individual MEMS switch being operable to individually define a closed electrical path that allows a charge transfer therethrough from the energy storage device to the electronic circuit.

2. The micro-electro-mechanical system module according to claim 1, wherein the MEMS switches comprise movable microstructures capable of physical movement between open positions that define the open electrical paths and closed positions that define the closed electrical paths.

3. The micro-electro-mechanical system module according to claim 2, wherein the movable microstructures comprise cantilevered beams.

4. The micro-electro-mechanical system module according to claim 2, wherein the movable microstructures comprise diaphragms.

5. The micro-electro-mechanical system module according to claim 1, wherein the MEMS switches comprise high-impedance contact paths that define the open electrical paths and whose conductivities are capable of being increased to define the closed electrical paths.

6. The micro-electro-mechanical system module according to claim 1, wherein at least some of the MEMS switches are adapted to define the closed electrical paths in response to at least one external input.

7. The micro-electro-mechanical system module according to claim 6, wherein the MEMS switches have different levels of sensitivity to the external input.

8. The micro-electro-mechanical system module according to claim 6, wherein the at least one external input is at least one condition chosen from the group consisting of temperature, relative humidity, chemicals, motion, shock, vibration, orientation, pressure, acceleration, and biological agents to which the MEMS switches are subjected.

9. The micro-electro-mechanical system module according to claim 6, wherein the MEMS switches comprise high-impedance contact paths that define the open electrical paths and whose conductivities increase in response to the external input to define the closed electrical paths.

10. The micro-electro-mechanical system module according to claim 6, wherein the MEMS switches comprise movable microstructures that respond to the external input by physical movement thereof between open positions that define the open electrical paths and closed positions that define the closed electrical paths.

11. The micro-electro-mechanical system module according to claim 10, wherein the movable microstructures are associated with contacts to define switches therebetween, a gap exists between each of the movable microstructures and its respective contact when in the open position thereof to substantially prevent charge leakage from the energy storage device, and each of the movable microstructures is responsive to changes in the external input so that when in the closed position thereof the moveable microstructure contacts its respective contact and thereby allows a charge transfer from the energy storage device.

12. The micro-electro-mechanical system module according to claim 11, wherein the movable microstructures comprise cantilevered beams.

13. The micro-electro-mechanical system module according to claim 11, wherein the movable microstructures comprise diaphragms.

14. The micro-electro-mechanical system module according to claim 11, further comprising means for electrically biasing the movable microstructures toward or away from their respective contacts.

15. The micro-electro-mechanical system module according to claim 1, wherein the electronic circuit comprises means for storing the charge transfer.

16. The micro-electro-mechanical system module according to claim 15, wherein the storing means comprises nonvolatile digital memory devices.

17. The micro-electro-mechanical system module according to claim 16, wherein the nonvolatile digital memory devices comprise MOS devices.

18. The micro-electro-mechanical system module according to claim 15, wherein the storing means comprises nonvolatile mechanical memory devices.

19. The micro-electro-mechanical system module according to claim 18, wherein at least one of the nonvolatile mechanical memory devices comprises:

a movable microstructure; and

at least one contact spaced apart from the movable microstructure and electrically biased relative to the movable microstructure, the movable microstructure and the contact being electrically biased relative to each other so as to define an open circuit path therebetween when spaced apart and a closed circuit path when the movable microstructure moves into contact with the contact.

20. The micro-electro-mechanical system module according to claim 19, wherein the movable microstructure or the contact is electrically coupled to at least one of the MEMS switches and the charge transfer delivered by the at least one MEMS switch from the energy storage device is sufficient to move the movable microstructure into contact with the contact and the electrical bias between the movable microstructure and the contact is sufficient to retain the movable microstructure in contact with the contact.

21. The micro-electro-mechanical system module according to claim 19, wherein the at least one of the nonvolatile mechanical memory devices is one of the MEMS switches of the controlling means, and the charge transfer from the energy storage device is sufficient to move the movable microstructure into contact with the contact and the electrical bias between the movable microstructure and the contact is sufficient to retain the movable microstructure in contact with the contact.

22. The micro-electro-mechanical system module according to claim 19, wherein the electronic circuit comprises means selected from the group consisting of means for resistively sensing, means for inductively sensing, and means for capacitively sensing the closed circuit path formed when the movable microstructure contacts the contact.

23. The micro-electro-mechanical system module according to claim 15, further comprising means coupled to the storing means for producing an output that correlates the charge transfer to the external input.

24. The micro-electro-mechanical system module according to claim 15, further comprising means for discharging the storing means.

25. The micro-electro-mechanical system module according to claim 24, wherein the discharging means comprises micro-electro-mechanical switches.

26. The micro-electro-mechanical system module according to claim 1, wherein the electronic circuit comprises electronic circuit devices.

27. The micro-electro-mechanical system module according to claim 26, further comprising means coupled to the electronic circuit devices for correlating outputs thereof to the external input.

28. The micro-electro-mechanical system module according to claim 26, wherein the electronic circuit devices are powered solely by the charge transfer from the energy storage device through the MEMS switches.

29. The micro-electro-mechanical system module according to claim 26, wherein the electronic circuit devices comprise at least one device chosen from the group consisting of timers, alarms, memory devices, and sensing devices.

30. The micro-electro-mechanical system module according to claim 1, wherein the energy storage device is selected from the group consisting of capacitors, batteries, and combinations thereof.

31. The micro-electro-mechanical system module according to claim 1, wherein the energy storage device comprises an integrated capacitor.

32. The micro-electro-mechanical system module according to claim 1, further comprising means for charging the energy storage device.

33. The micro-electro-mechanical system module according to claim 32, further comprising:

a mechanical switch between the charging means and the energy storage device, the mechanical switch having an open position that defines an open electrical path that prevents charge delivery to the energy storage device and a closed position that defines a closed electrical path that allows charge delivery to the energy storage device; and

means for controlling the mechanical switch to selectively allow charging of the energy storage device.

34. The micro-electro-mechanical system module according to claim 33, further comprising:

an integrated circuit switch coupled to the mechanical switch and operable to selectively allow and prevent current flow to the mechanical switch; and

means for controlling the integrated circuit switch to selectively allow current flow to the mechanical switch.

35. The micro-electro-mechanical system module according to claim 32, wherein the module does not comprise a battery.

36. The micro-electro-mechanical system module according to claim 32, wherein the charging means comprises means for wirelessly delivering power to the module.

37. The micro-electro-mechanical system module according to claim 1, wherein the electronic circuit contains a leaky electrical junction and the open electrical paths defined by the MEMS switches prevent charge leakage from the energy storage device through the leaky electrical junction.

38. The micro-electro-mechanical system module according to claim 37, wherein the leaky electrical junction comprises a p-n junction or gate of the electronic circuit.

39. A micro-electro-mechanical system module comprising:

at least one integrated energy storage device having a charge thereon;

multiple circuit devices that are powered by the charge on the energy storage device; and

means electrically coupled to the energy storage device for controlling charge transfers from the energy storage device to the circuit devices while preventing charge leakage from the energy storage device to the circuit devices to enable the energy storage device to store energy over an extended period of time, the controlling means comprising a plurality of integrated MEMS switches, each of the circuit devices being electrically coupled to the energy storage device by at least one individual MEMS switch of the MEMS switches so that the MEMS switches define electrical paths between the energy storage device and the circuit devices, each individual MEMS switch being adapted to individually open and close a corresponding one of the electrical paths and thereby define an open electrical path that prevents charge leakage therethrough from the energy storage device to one of the circuit devices and define a closed electrical path that allows a charge transfer therethrough from the energy storage device to one of the circuit devices.

40. The micro-electro-mechanical system module according to claim 39, wherein at least one of the circuit devices contains a leaky electrical junction and the open electrical path defined by at least one of the MEMS switches prevents charge leakage from the energy storage device through the leaky electrical junction.

41. The micro-electro-mechanical system module according to claim 40, wherein the leaky electrical junction comprises a p-n junction or gate of the at least one circuit device.

42. A micro-electro-mechanical system module comprising:

at least one integrated energy storage device;

a power source for supplying power to the energy storage device, the power source containing circuitry through which charge leakage can occur; and

means electrically coupling the power source to the energy storage device for controlling charging of the energy storage device, the controlling means comprising a MEMS switch that defines an open electrical path that prevents charge leakage from the energy storage device through the circuitry of the power source and being operable to define a closed electrical path that allows charging of the energy storage device by the power source.

43. The micro-electro-mechanical system module according to claim 42, further comprising:

an integrated circuit switch coupled to the MEMS switch and operable to selectively allow and prevent current flow to the MEMS switch; and

means for controlling the integrated circuit switch to selectively allow current flow to the MEMS switch.