Electromechanical device with optical function separated from mechanical and electrical function

• US 7,920,319 B2
• Filed: 12/03/2009
• Issued: 04/05/2011
• Est. Priority Date: 07/02/2007
• Status: Expired due to Fees

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: Qualcomm MEMS Technologies Incorporated (Qualcomm, Inc.)
• Inventors: Endisch, Denis, Mignard, Marc
• Primary Examiner(s): Spector; David N
• Application Number:
  US12/630,741
• Publication Number:
  US 20100085625A1
• Time in Patent Office: 488 Days
• Field of Search: 359/290, 359/291, 359/292, 359/295
• US Class Current: 359/291
• CPC Class Codes: B81B 2201/047 Optical MEMS not provided for in B81B2201/042 - B81B2201/045
• CPC Class Codes: B81B 3/0083 Optical properties
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26

Abstract

In certain embodiments, a microelectromechanical (MEMS) device comprises a substrate having a top surface, a movable element over the substrate, and an actuation electrode disposed laterally from the reflective surface. The movable element comprises a deformable layer and a reflective element mechanically coupled to the deformable layer. The reflective element includes a reflective surface. The movable element is responsive to a voltage difference applied between the actuation electrode and the movable element by moving in a direction generally perpendicular to the top surface of the substrate.

Claims

1. An electromechanical device comprising:

a substrate;

a movable element over the substrate, the movable element comprising an electrically conductive deformable layer and a reflective element mechanically coupled to the deformable layer, the reflective element including a reflective surface, the reflective surface spaced from the deformable layer along a direction generally parallel to the reflective surface; and

an actuation electrode under at least a portion of the deformable layer and disposed laterally from the reflective surface, wherein the movable element is responsive to a voltage difference applied between the actuation electrode and the deformable layer by moving in a direction towards or away from the substrate.

2. The electromechanical device of claim 1, wherein the movable element further comprises at least one connecting element, the at least one connecting element mechanically coupling the reflective element to the deformable layer.

3. The electromechanical device of claim 1, wherein the device is configured such that the reflective surface is not in contact with a surface of the device when an actuation voltage difference is applied between the actuation electrode and the deformable layer.

4. An electromechanical device comprising:

a movable element comprising an electrically conductive deformable layer and a reflective element mechanically coupled to the deformable layer, the reflective element including a reflective surface, the reflective surface spaced from the deformable layer along a direction generally parallel to the reflective surface; and

an actuation electrode under at least a portion of the deformable layer and disposed laterally from the reflective surface, wherein the movable element is responsive to a voltage difference applied between the actuation electrode and the deformable layer by moving from a first position to a second position.

5. The electromechanical device of claim 4, wherein the movable element further comprises at least one connecting element, the at least one connecting element mechanically coupling the reflective element to the deformable layer.

6. The electromechanical device of claim 4, wherein the device is configured such that the reflective surface is not in contact with a surface of the device when an actuation voltage difference is applied between the actuation electrode and the deformable layer.

7. An electromechanical device comprising:

a movable element comprising an electrically conductive deformable layer and a reflective element mechanically coupled to the deformable layer, the reflective element including a reflective surface; and

an actuation electrode under at least a portion of the deformable layer and disposed laterally from the reflective surface, wherein the movable element is responsive to a voltage difference applied between the actuation electrode and the deformable layer by moving from a first position to a second position.

8. The electromechanical device of claim 7, wherein the reflective element is mechanically coupled to a top surface of the deformable layer.

9. The electromechanical device of claim 7, wherein the reflective element is mechanically coupled to a bottom surface of the deformable layer.

10. The electromechanical device of claim 7, wherein the device is configured such that the reflective surface is not in contact with a surface of the device when an actuation voltage difference is applied between the actuation electrode and the deformable layer.

11. The electromechanical device of claim 7, wherein the device is configured such that the application of a voltage difference between the actuation electrode and the deformable layer causes movement of the deformable layer and movement of the reflective surface, the movement of the deformable layer parallel to the movement of the reflective surface, the movement of the deformable layer on a different plane than the movement of the reflective surface.

12. The electromechanical device of claim 7, wherein the movable element further comprises at least one connecting element, the at least one connecting element mechanically coupling the reflective element to the deformable layer.

13. The electromechanical device of claim 12, further comprising a first connecting element mechanically coupled to a first edge of the reflective element and a second connecting element mechanically coupled to a second edge of the reflective element, the first edge positioned substantially opposite the second edge.

14. The electromechanical device of claim 12, wherein the reflective element comprises a plurality of edges, and wherein the at least one connecting element mechanically couples each of the plurality of edges to the deformable layer.

15. An electromechanical device comprising:

a movable element comprising an electrically conductive deformable layer and a reflective element mechanically coupled to the deformable layer, the reflective element including a reflective surface, wherein the movable element further comprises at least one connecting element, the at least one connecting element mechanically coupling the reflective element to the deformable layer, wherein the at least one connecting element comprises at least one protrusion extending from the reflective element; and

an actuation electrode under at least a portion of the deformable layer and disposed laterally from the reflective surface, wherein the movable element is responsive to a voltage difference applied between the actuation electrode and the deformable layer by moving from a first position to a second position.

16. The electromechanical device of claim 15, wherein the reflective element is mechanically coupled to a top surface of the deformable layer.

17. The electromechanical device of claim 15, wherein the reflective element is mechanically coupled to a bottom surface of the deformable layer.

18. The electromechanical device of claim 15, wherein the movable element further comprises at least one connecting element, the at least one connecting element mechanically coupling the reflective element to the deformable layer.

19. The electromechanical device of claim 15, further comprising a first connecting element mechanically coupled to a first edge of the reflective element and a second connecting element mechanically coupled to a second edge of the reflective element, the first edge positioned substantially opposite the second edge.

20. The electromechanical device of claim 15, wherein the reflective element comprises a plurality of edges, and wherein the at least one connecting element mechanically couples each of the plurality of edges to the deformable layer.

21. The electromechanical device of claim 15, wherein the device is configured such that the reflective surface is not in contact with a surface of the device when an actuation voltage difference is applied between the actuation electrode and the deformable layer.

22. The electromechanical device of claim 15, wherein the device is configured such that the application of a voltage difference between the actuation electrode and the deformable layer causes movement of the deformable layer and movement of the reflective surface, the movement of the deformable layer parallel to the movement of the reflective surface, the movement of the deformable layer on a different plane than the movement of the reflective surface.

23. The electromechanical device of claim 15, wherein the reflective element is configured to reflect a first color in the first position and to reflect a second color in the second position.

24. The electromechanical of claim 15, further comprising a second actuation electrode over the movable element, wherein the movable element is further responsive to a voltage difference applied between the second actuation electrode and the movable element by moving from the first position to a third position.

25. The electromechanical device of claim 24, further comprising an insulating layer on an upper surface of the movable element.

26. The electromechanical device of claim 24, further comprising an insulating layer on a lower surface of the second actuation electrode.

27. The electromechanical device of claim 24, wherein the device is configured to reflect a first color when the reflective element is in the first position, to reflect a second color when the reflective element is in the second position, and to reflect a third color when the reflective element is in the third position.

28. An electromechanical device comprising:

a movable element comprising an electrically conductive deformable layer and a reflective element mechanically coupled to the deformable layer, the reflective element including a reflective surface;

an actuation electrode under at least a portion of the deformable layer and disposed laterally from the reflective surface, wherein the movable element is responsive to a voltage difference applied between the actuation electrode and the deformable layer by moving from a first position to a second position; and

a second actuation electrode over the movable element, wherein the movable element is further responsive to a voltage difference applied between the second actuation electrode and the movable element by moving from the first position to a third position.

29. The electromechanical device of claim 28, further comprising an insulating layer on an upper surface of the movable element.

30. The electromechanical device of claim 28, further comprising an insulating layer on a lower surface of the second actuation electrode.

31. The electromechanical device of claim 28, wherein the device is configured to reflect a first color when the reflective element is in the first position, to reflect a second color when the reflective element is in the second position, and to reflect a third color when the reflective element is in the third position.

32. The electromechanical device of claim 28, wherein the reflective element is mechanically coupled to a top surface of the deformable layer.

33. The electromechanical device of claim 28, wherein the reflective element is mechanically coupled to a bottom surface of the deformable layer.

34. The electromechanical device of claim 28, wherein the device is configured such that the reflective surface is not in contact with a surface of the device when an actuation voltage difference is applied between the actuation electrode and the deformable layer.

35. The electromechanical device of claim 28, wherein the device is configured such that the application of a voltage difference between the actuation electrode and the deformable layer causes movement of the deformable layer and movement of the reflective surface, the movement of the deformable layer parallel to the movement of the reflective surface, the movement of the deformable layer on a different plane than the movement of the reflective surface.

36. An electromechanical device comprising:

a movable element comprising an electrically conductive deformable layer and a reflective element mechanically coupled to the deformable layer, the reflective element including a reflective surface; and

an actuation electrode under at least a portion of the deformable layer and disposed laterally from the reflective surface, wherein the movable element is responsive to a voltage difference applied between the actuation electrode and the deformable layer by moving from a first position to a second position, wherein the reflective element is configured to reflect a first color in the first position and to reflect a second color in the second position.

37. The electromechanical device of claim 36, wherein the reflective element is mechanically coupled to a top surface of the deformable layer.

38. The electromechanical device of claim 36, wherein the reflective element is mechanically coupled to a bottom surface of the deformable layer.

39. The electromechanical device of claim 36, wherein the device is configured such that the reflective surface is not in contact with a surface of the device when an actuation voltage difference is applied between the actuation electrode and the deformable layer.

40. The electromechanical device of claim 36, wherein the device is configured such that the application of a voltage difference between the actuation electrode and the deformable layer causes movement of the deformable layer and movement of the reflective surface, the movement of the deformable layer parallel to the movement of the reflective surface, the movement of the deformable layer on a different plane than the movement of the reflective surface.