Systems and methods for the production of highly tetrahedral amorphous carbon coatings

  • US 7,931,748 B2
  • Filed: 12/12/2008
  • Issued: 04/26/2011
  • Est. Priority Date: 05/31/1996
  • Status: Expired due to Fees
First Claim
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1. A method of forming a layer of diamond like carbon with an ion stream, the method comprising:

  • generating a plasma;

    varying a DC bias voltage to selectively control an ion impact energy of the ion stream;

    applying the DC bias voltage to the plasma to generate the ion stream; and

    forming the layer of diamond like carbon having a thickness of less than about 75 Å

    with the ion stream having the controlled energy.

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