Systems and methods for the production of highly tetrahedral amorphous carbon coatings

  • US 7,931,748 B2
  • Filed: 12/12/2008
  • Issued: 04/26/2011
  • Est. Priority Date: 05/31/1996
  • Status: Expired due to Fees
First Claim
Patent Images

1. A method of forming a layer of diamond like carbon with an ion stream, the method comprising:

  • generating a plasma;

    varying a DC bias voltage to selectively control an ion impact energy of the ion stream;

    applying the DC bias voltage to the plasma to generate the ion stream; and

    forming the layer of diamond like carbon having a thickness of less than about 75 Å

    with the ion stream having the controlled energy.

View all claims
    ×
    ×

    Thank you for your feedback

    ×
    ×