Semiconductor device

• US 7,935,958 B2
• Filed: 10/18/2005
• Issued: 05/03/2011
• Est. Priority Date: 10/22/2004
• Status: Expired due to Fees

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Yukawa, Mikio, Abe, Hiroko, Arai, Yasuyuki, Watanabe, Yasuko, Iwaki, Yuji, Yamazaki, Shunpei, Moriya, Yoshitaka
• Primary Examiner(s): Parker; Kenneth A
• Assistant Examiner(s): Diaz; Jose R
• Application Number:
  US11/547,632
• Publication Number:
  US 20080210928A1
• Time in Patent Office: 2,023 Days
• Field of Search: 257/40
• US Class Current: 257/40
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: G11C 13/00 Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
• CPC Class Codes: G11C 13/0014 comprising cells based on organic memory material
• CPC Class Codes: G11C 17/14 in which contents are determined by selectively establishing, breaking or modifying connecting links by permanently altering the state of coupling elements, e.g. PROM
• CPC Class Codes: G11C 17/143 using laser-fusible links
• CPC Class Codes: G11C 17/16 using electrically-fusible links
• CPC Class Codes: H10K 19/202 Integrated devices comprising a common active layer
• CPC Class Codes: H10K 85/611 Charge transfer complexes
• CPC Class Codes: H10K 85/631 Amine compounds having at least two aryl rest on at least one amine-nitrogen atom, e.g. triphenylamine

Abstract

The present invention provides a semiconductor device which has a storage element having a simple structure in which an organic compound layer is sandwiched between a pair of conductive layers and a manufacturing method of such a semiconductor device. With this characteristic, a semiconductor device having a storage circuit which is nonvolatile, additionally recordable, and easily manufactured and a manufacturing method of such a semiconductor device are provided. A semiconductor device according to the present invention has a plurality of field-effect transistors provided over an insulating layer and a plurality of storage elements provided over the plurality of field-effect transistors. Each of the plurality of field-effect transistors uses a single-crystal semiconductor layer as a channel portion and each of the plurality of storage elements is an element in which a first conductive layer, an organic compound layer, and a second conductive layer are stacked in order.

Claims

1. A semiconductor device comprising:

a plurality of field-effect transistors each of which is provided over a first insulating layer and uses a single-crystal semiconductor layer as a channel portion;

a second insulating layer covering the plurality of field-effect transistors;

a third insulating layer formed over the second insulating layer;

a first conductive layer connected to one of a source region and a drain region of one of the plurality of field-effect transistors through a first opening portion provided in the second insulating layer and the third insulating layer;

a second conductive layer connected to one of a source region and a drain region of another one of the plurality of field-effect transistors through a second opening portion provided in the second insulating layer and the third insulating layer;

a fourth insulating layer formed over the first conductive layer and the second conductive layer;

an organic compound layer formed in a third opening portion provided in the fourth insulating layer and over the first conductive layer; and

a third conductive layer covering the organic compound layer,

wherein the first conductive layer and the second conductive layer are provided in the same layer, and

wherein the second conductive layer is an antenna.

2. The semiconductor device according to claim 1,

wherein the first insulating layer is a silicon oxide layer.

3. The semiconductor device according to claim 1,

wherein the semiconductor device further comprises a fifth insulating layer over the third conductive layer.

4. The semiconductor device according to claim 1,

wherein a thickness of the organic compound layer is equal to or greater than 10 nm and equal to or less than 20 nm.

5. The semiconductor device according to claim 1,

wherein the second conductive layer is fully covered by the fourth insulating layer.

11. The semiconductor device according to any one of claims 1 and 6,

wherein the organic compound layer has a carrier-transporting material.

12. The semiconductor device according to any one of claims 1 and 6,

wherein the organic compound layer has a carrier-transporting material, and

wherein a conductance of the organic compound layer ranges from 1.0×

10<sup>−

15</sup> S·

cm<sup>−

1</sup> to 1.0×

10<sup>−

3</sup> S·

cm<sup>−

1</sup>.

13. The semiconductor device according to any one of claims 1 and 6,

wherein the organic compound layer has a conjugate polymer material.

14. The semiconductor device according to any one of claims 1 and 6,

wherein the organic compound layer has an electron-transporting material or a hole-transporting material.

15. The semiconductor device according to any one of claims 1 and 6,

wherein the first conductive layer is in contact with the organic compound layer.

16. The semiconductor device according to any one of claims 1 and 6,

wherein the third conductive layer is aluminum.

6. A semiconductor device comprising:

a plurality of field-effect transistors each of which uses a single-crystal semiconductor layer as a channel portion;

an insulating layer covering the plurality of field-effect transistors;

a first conductive layer over the insulating layer, the first conductive layer being connected to one of a source region and a drain region of one of the plurality of field-effect transistors;

a second conductive layer over the insulating layer, the second conductive layer being connected to one of a source region and a drain region of another one of the plurality of field-effect transistors;

an organic compound layer formed over the first conductive layer; and

a third conductive layer covering the organic compound layer,

wherein the first conductive layer and the second conductive layer are provided in the same layer, and

wherein the second conductive layer is an antenna.

7. The semiconductor device according to claim 6,

wherein the thickness of the organic compound layer is equal to or greater than 10 nm and equal to or less than 20 nm.

8. The semiconductor device according to claim 6,

wherein the insulating layer is a silicon oxide layer.

9. The semiconductor device according to claim 6,

wherein the semiconductor device further comprises a second insulating layer over the third conductive layer.

10. The semiconductor device according to claim 6,

wherein the semiconductor device further comprises a second insulating layer over the first conductive layer and the second conductive layer, and

wherein the second conductive layer is fully covered by the second insulating layer.