Piston mode acoustic wave device and method providing a high coupling factor

• US 7,939,989 B2
• Filed: 09/22/2009
• Issued: 05/10/2011
• Est. Priority Date: 09/22/2009
• Status: Active Grant

• Current Assignee: Qorvo US, Inc. (Qorvo, Inc.)
• Original Assignee: TriQuint Semiconductor Incorporated (Qorvo, Inc.)
• Inventors: Solal, Marc, Gamble, Kevin, Aigner, Robert, Gratier, Julien
• Primary Examiner(s): Dougherty; Thomas M
• Application Number:
  US12/564,305
• Publication Number:
  US 20110068655A1
• Time in Patent Office: 595 Days
• Field of Search: 310/313.B, 310/313.C
• US Class Current: 310/313.00B
• CPC Class Codes: H03H 9/02724 Comb like grating lines
• CPC Class Codes: H03H 9/02858 of wave front distortion
• CPC Class Codes: H03H 9/1452 by finger overlap length, apodisation
• CPC Class Codes: H03H 9/1457 Transducers having different finger widths

Abstract

An interdigital transducer includes an edge gap length between ends of electrodes and the opposing busbar increased sufficiently for reducing or even eliminating tunneling effects through the gap. As a result, a wave velocity of the acoustic wave within the longitudinally extending edge regions is less than the wave velocity within the transducer center region, and the wave velocity within the opposing gap regions is greater than a velocity in the transducer center region, thus an essentially flat propagation mode results within the aperture of the transducer. A SAW transducer or a SAW resonator on a high coupling substrate will thus guide the energy in the transducer region without a need for apodization. Higher equivalent coupling factors as well as lower losses are obtained.

Claims

1. An acoustic wave device comprising:

a piezoelectric substrate having a surface for supporting an acoustic wave;

a first elongate busbar and an opposing second elongate busbar;

a plurality of first electrodes electrically connected to and extending transversely from the first busbar; and

a plurality of second electrodes electrically connected to and extending from the second busbar,

wherein the opposing busbars and the plurality of electrodes form an interdigital transducer carried on the surface of the piezoelectric substrate,

wherein each of the plurality of electrodes has a first end electrically connected to one of the first and second busbars and an opposing second end having an edge spaced from the opposing busbar so as to form a gap between the edge of each electrode and the opposing busbar, the gaps proximate the opposing busbars forming a gap region extending longitudinally along the transducer, wherein the gap length dimension is at least one acoustic wavelength,

each electrode within the plurality of electrodes is further defined by a first transversely extending portion proximate the electronically connected busbar and generally contained within the gap region, a second transversely extending portion proximate the edge and defining an edge region extending longitudinally along the transducer, and a third transversely extending portion of the electrode therebetween, the third transversely extending portion within a transducer center region,

the second transversely extending portions within the edge regions, respectively, having a physical characteristic that is different than the third transversely extending portion within the transducer center region so as to provide a wave velocity of the acoustic wave within the longitudinally extending edge regions to be less than the wave velocity within the transducer center region, and wherein the wave velocity within the opposing gap regions is greater than a velocity in the transducer center region.

2. The acoustic wave device according to claim 1, wherein the second transversely extending portion within the opposing edge regions has a width dimension greater than a width dimension of the first and third transversely extending portions within the gap and transducer center regions, respectively, so as to provide an increased duty factor.

3. The acoustic wave device according to claim 1, further comprising a plurality of dummy electrodes each extending from the opposing busbars so as to form dummy electrode regions adjacent to the opposing busbars.

4. The acoustic wave device according to claim 1, further comprising first and second gratings carried on the surface of the substrate on opposing longitudinal ends of the interdigital transducer.

5. The acoustic wave device according to claim 4, wherein preselected electrodes within the gratings and most removed from the transducer are electrically connected so at to be short circuited.

6. The acoustic wave device according to claim 4, wherein electrodes within each of the first and second gratings are structured as the electrodes within the transducer.

7. The acoustic wave device according to claim 1, further comprising at least one of a dielectric layer and a metal layer extending longitudinally along the transducer, the layer only covering the electrode portions within the transducer center region, wherein the layer results in an increased velocity of the acoustic wave within the center region.

8. The acoustic wave device according to claim 1, wherein the electrode portions within the gap, edge and center regions form an apodized transducer.

9. The acoustic wave device according to claim 1, wherein the electrode portions within the center regions have equal transverse length dimensions and the edge regions have unequal transverse length dimensions resulting in an apodized edge region structure for the transducer.

10. The acoustic wave device according to claim 1, wherein each of the electrode portions within the edge regions have a tapered width dimension.

11. The acoustic wave device according to claim 10, wherein the tapered electrode portions taper from a first width dimension equal the width dimension of the electrode portions within the center region to a second width dimension equal the width dimension of the electrode portions of the gap regions.

12. The acoustic wave device according to claim 1, wherein the gap length dimension is larger than three acoustic wavelengths.

13. The acoustic wave device according to claim 1, further comprising at least one of a dielectric layer and a metal layer extending longitudinally along the transducer, the layer only covering the electrode portions within the transducer edge region, wherein the layer results in an decreased velocity of the acoustic wave within the edge region.

14. The acoustic wave device according to claim 1, further comprising a silicon oxide overcoat sufficiently covering the transducer to reduce a temperature sensitivity thereof.

15. The acoustic device according to claim 14, wherein the length of the edge is smaller than 1.5 times the acoustic wavelength.

16. The acoustic wave device according to claim 1, wherein the electrodes are formed from a metal having a higher density than aluminum.

17. The acoustic wave device according to claim 1, wherein the electrodes comprise copper.

18. The acoustic wave device according to claim 1, wherein the piezoelectric substrate comprises Lithium Niobate having an orientation between Y+120 deg and Y+136 deg.

19. The acoustic wave device according to claim 1, wherein a duty factor of electrode portions in the edge regions is between 70% and 80%.

20. An surface acoustic wave device comprising:

a piezoelectric substrate having a surface for propagating acoustic waves;

a first elongate busbar and an opposing second elongate busbar extending generally along a longitudinal path of the acoustic waves;

a plurality of first electrodes electrically connected to and extending from the first busbar;

a plurality of second electrodes electrically connected to and extending from the second busbar, wherein the opposing busbars and the plurality of electrodes form an interdigital transducer carried on the piezoelectric substrate for the propagating acoustic waves, wherein each of the plurality of the electrodes has a first end electrically connected to one of the first and second busbars and an opposing second end having an edge spaced from the opposing busbar so as to form a gap between the edge of each electrode and the opposing busbar, the gaps proximate the opposing busbars forming a gap region extending longitudinally along the transducer, and wherein a length dimension of the gap is at least a wavelength of the propagating acoustic waves; and

a first layer covering the transducer, a second layer extending longitudinally along the transducer, the second layer covering the electrode portions within the edge regions, wherein a velocity of the acoustic waves within opposing gap regions is greater than a velocity in a transducer center region between the gap regions, and wherein the wave velocity of the edge region is less than the wave velocity of the center region, the layers formed from at least one of a dielectric material and a metal material.

23. The acoustic wave device according to claim 20, further comprising a third layer covering electrode portions within the gap, edge and center regions.

21. An surface acoustic wave device comprising:

a piezoelectric substrate having a surface for propagating acoustic waves;

a first elongate busbar and an opposing second elongate busbar extending generally along a path of the acoustic waves;

a plurality of first electrodes electrically connected to and extending from the first busbar;

a plurality of second electrodes electrically connected to and extending from the second busbar, wherein the opposing busbars and the plurality of electrodes form an interdigital transducer carried on the piezoelectric substrate for the propagating acoustic waves, and wherein each of the plurality of the electrodes has a first end electrically connected to one of the first and second busbars and an opposing second end having an edge spaced from the opposing busbar so as to form a gap between the edge of each electrode and the opposing busbar, the gaps proximate the opposing busbars forming opposing gap regions extending longitudinally along the transducer, and wherein a length dimension of the gap within each of the opposing gap regions is at least a wavelength for the propagating acoustic waves;

each electrode within the plurality of electrodes is further defined by a first transversely extending portion proximate the electronically connected busbar and generally contained within the gap regions, a second transversely extending portion proximate the edge and defining the edge regions extending longitudinally along the transducer, and a third transversely extending portion of the electrode therebetween, the third transversely extending portion defined within a transducer center region;

a first layer covering the transducer; and

a second layer extending longitudinally along the transducer, the second layer covering only electrode portions within a transducer center regions,

wherein a velocity of the acoustic waves within opposing gap regions is greater than a velocity in a transducer center region between the gap regions, and wherein the wave velocity of the edge region is less than the wave velocity of the center region, the layers formed from at least one of a dielectric material and a metal material.

22. The acoustic wave device according to claim 21, further comprising a third layer covering electrode portions within the gap, edge and center regions.